Journal of Chemical Physics p. 1301 - 1311 (1983)
Update date:2022-08-10
Topics:
Chatham, H.
Hils, D.
Robertson, R.
Gallagher, A. C.
The rate coefficients and product-ion distributions for the reactions of He+ and Ar+ with silane and disilane have been measured in a drift tube, typically for collision energies of 0.01-1 eV.The total charge-exchange rate coefficients are found to be roughly independent of E/N, or collision energy, and are about equal to the Langevin values for the reactions of He+ with SiH4 and C2H6 and Ar+ with CH4 and C2H6.The He+ rate coefficients on CH4 and Si2H6, and the Ne+ rate coefficients on SiH4 and Si2H6 are 50percent to 80percent of the Langevin values, while the Ar+ rate coefficients on SiH4 and Si2H6 are much smaller.Product ions tend to be hydrogen poor with very infrequent breaking of the C-C or Si-Si bonds.Furthermore, hydrogen stripping is more severe for the silanes than the alkanes.These product-ion distributions bear no resemblance to the product-ion distributions of either photoionization or electron collisional ionization.
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