Full text of DOI:10.1063/1.104523

Sharp boron spikes in silicon grown by fast gas switching chemical vapor
deposition
P. J. Roksnoer, J. W. F. M. Maes, A. T. Vink, C. J. Vriezema, and P. C. Zalm
Citation: Applied Physics Letters 58, 711 (1991); doi: 10.1063/1.104523
View online: http://dx.doi.org/10.1063/1.104523
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/58/7?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
5.102.73.105 On: Fri, 21 Nov 2014 22:35:29
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
5.102.73.105 On: Fri, 21 Nov 2014 22:35:29
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
5.102.73.105 On: Fri, 21 Nov 2014 22:35:29
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