3
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R. Krumm et al. / Electrochimica Acta 45 (2000) 3255–3262
the so-called overpotential deposition (OPD) range EB
EMe/Mez+ with nucleation and growth of the 3D Me
bulk phase. In the case of a strong Me–S interaction
band gap, and is more positive than the flat band
potential Efb (EMe/Mez+ ꢁE ) a depletion layer is
fb
formed in the n-type semiconductor at E=EMe/Mez+.
Thus, electrode potentials more negative than the flat
band potential (EBEfb) are needed in this case to reach
a sufficient surface electron density (accumulation con-
ditions) and electrodeposition of metals in such systems
occurs at high cathodic overpotentials (Fig. 1b).
Mechanism of metal deposition and structures of
electrodeposits on foreign metal substrates have been
extensively studied using various electrochemical meth-
ods and in situ SPM (scanning probe microscopy)
techniques [1]. Despite its technological importance,
electrodeposition of metals on semiconductor substrates
has been the object of relatively few studies to date
(
strong adhesion), however, the deposition process can
start even at undersaturation in the so-called underpo-
tential deposition (UPD) range E\EMe/Mez+ with for-
mation of low-dimensional metal phases, which act as
precursors for the nucleation and growth of the 3D Me
bulk phase in the OPD range.
Kinetics and mechanism of metal electrodeposition
and the involved phase formation phenomena can also
be influenced significantly by electronic properties of
the foreign substrate. In the case of deposition on
foreign metal substrates the substrate surface is a con-
tinuum of electronic states and thus, sufficient supersat-
urations for nucleation of the Me bulk phase are
usually reached by application of relatively low ca-
thodic overpotentials. The situation, however, becomes
more complicated in the case of electrodeposition of
metals on semiconductor substrates. The influence of
the space charge layer in the semiconductor has to be
taken into account in this case [2–6]. For a not very
high doped n-type semiconductor, the surface concen-
tration of electrons and the band bending at the actual
electrode potential play an important role in the elec-
trodeposition process. Neglecting the influence of sur-
face states, the mechanism of metal deposition in this
case depends strongly on the relative position of the
equilibrium potential EMe/Mez+with respect to the flat
band potential Efb of the semiconductor substrate (Fig.
[
2–12]. Recent investigations of metal electrodeposition
on n-GaAs(100) [7,8], n-Si(111) [9–11] and n-Si(100)
12] provided new important information about the
[
nucleation and growth kinetics, and the role of sub-
strate surface inhomogeneities in the deposition pro-
cess. More studies are needed, however, to understand
the complex nature and mechanism of electrochemical
metal phase formation on semiconductor substrates.
In this paper we present new results on the mecha-
nism and kinetics of the initial stages of metal elec-
trodeposition, on H-terminated n-Si(111) substrates
from acidic sulfate electrolyte solutions. The systems
+
2+
n-Si(111)/Tl and n-Si(111)/Cd
are selected as typi-
cal examples for systems characterized by E
ꢀ
Me/Mez+
2+
E , whereas n-Si(111)/Cu
is chosen as an example
fb
for a system with EMe/Mez+ ꢁE . The experimental
fb
1). If EMe/Mez+ ꢀEfb accumulation layer is formed at
results are compared with data obtained by electrode-
position of the same metals on other substrates.
E=EMe/Mez+and the deposition of the Me bulk phase
usually occurs at relatively small cathodic overpoten-
tials, such as on metal substrates (Fig. 1a). However, if
the equilibrium potential EMe/Mez+, is located in the
2. Experimental
The experiments were carried out in the following
systems:
1
2
3
. n-Si(111)/5 mM Tl SO , 0.5 M Na SO , 5 mM
2 4 2 4
H SO (pH 2),
2
4
. n-Si(111)/5 mM CdSO , 0.5 M Na SO , 5 mM
4
2
4
H SO (pH 2),
2
4
. n-Si(111)/10 mM CuSO , 0.5 M H SO (pH 0.3).
4
2
4
Electrolyte solutions were prepared from Suprapure
®
chemicals and Millopore water. Prior to each mea-
surement, the solutions were deaerated in the electro-
chemical cell with pure nitrogen (99.999%). The
electrochemical cell consisted of a Pt counter electrode,
a reference Hg/HgSO /Na SO (sat.) electrode (MSE)
4
2
4
and a n-Si(111) working electrode. All electrode poten-
tials are referred to the SHE potential and/or to the
corresponding Nernst equilibrium potential EMe/Mez+.
Silicon working electrodes were made from n-doped
Si(111) wafers (Siltronix, France) of 1–5 V cm resistiv-
ity and 0° misorientation. Samples were subsequently
Fig. 1. Schematic band diagrams for electrodeposition of
different metals (Me1 and Me ) on a n-semiconductor with a
2
flatband potential E . Relative positions of corresponding
fb
metal equilibrium potentials with respect to Efb are also indi-
cated. (a) EMe1/Me ꢀEfb; deposition potential E , (b)
z+
1
1
EMe2/Me ꢁE ; deposition potential E .
z+
fb
2
2