Fabrication of flexible microsupercapacitors with binder-free ZIF-8 derived carbon films via electrophoretic deposition

Article abstract of DOI:10.1246/BCSJ.20190298

Miniaturized power supplies, such as microsupercapacitors, are highly demanded in micro-electro mechanical systems (MEMS) and micro portable microdevices due to their superior cyclability, high power density, and considerable energy. In this study, we utilize ZIF-8 derived carbon as a source of active material to fabricate flexible microsupercapacitors via a simple electrophoresis method. The deposited ZIF-8 derived carbon particles with high surface area play a decisive role in achieving high electrochemical performances. The simple and straightforward process of electrophoretic deposition using ZIF-8 derived carbon particles generates porous carbon films on microsupercapacitors, which leads to a superior electrochemical performance.

Full text of DOI:10.1246/BCSJ.20190298

Document type: Article
BCSJ Award Article
Fabrication of Flexible Microsupercapacitors with Binder-Free ZIF-8
Derived Carbon Films via Electrophoretic Deposition
Yang Li,1,2,3,4,# Joel Henzie,* Teahoon Park, Jie Wang,4,# Christine Young, Huaqing Xie,
4
5,#
4
1,2,3
5
1,2,3
Minjun Kim, Jeonghun Kim, Yusuke Yamauchi,* and Jongbeom Na*4,6
6
6
6,7
Jin Woo Yi, Jing Li,
1School of Environmental and Materials Engineering, College of Engineering, Shanghai Polytechnic University,
Shanghai 201209, P. R. China
2Shanghai Innovation Institute for Materials, Shanghai 200444, P. R. China
3Research Center of Resource Recycling Science and Engineering, Shanghai Polytechnic University,
Shanghai 201209, P. R. China
4International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS),
1
-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
5Carbon Composite Department, Composites Research Division, Korea Institute of Materials Science (KIMS),
97, Changwon-daero, Seongsan-gu, Changwon-si, Gyeongsangnam-do, 51508, South Korea
7
6School of Chemical Engineering and Australian Institute for Bioengineering and Nanotechnology (AIBN),
The University of Queensland, Brisbane, Queensland 4072, Australia
7Department of Plant and Environmental New Resources, Kyung Hee University,
1732 Deogyeong-daero, Giheung-gu, Yongin-si, Gyeonggi-do 446-701, South Korea
E-mail: HENZIE.Joeladam@nims.go.jp (J. Henzie), y.yamauchi@uq.edu.au (Y. Yamauchi), j.na@uq.edu.au (J. Na)
Received: October 23, 2019; Accepted: October 31, 2019; Web Released: November 7, 2019
Prof. Yusuke Yamauchi
Prof. Yusuke Yamauchi received his bachelor’s degree (2003), master degree (2004), and a Ph.D. degree
(
2007) from Waseda University (Japan). After that, he joined NIMS to start his research group. In 2017, he
moved to Australia to join The University of Queensland. Currently, he is a full professor at School of
Chemical Engineering and a senior group leader at AIBN. He concurrently serves as an honorary group
leader of NIMS, a visiting professor at several universities, and an associate editor of the Journal of Materials
Chemistry A. He has published more than 750 papers in international refereed journals with >35,000
citations (h-index >100). He has been selected as a Highly Cited Researcher in Chemistry in 2016, 2017,
2
018, and 2019. He has received many outstanding awards, such as the NISTEP Award by National Institute
of Science and Technology Policy (2016), the Chemical Society of Japan (CSJ) Award for Young Chemists
2014), the Young Scientists’ Prize of the Commendation for Science and Technology by MEXT (2013), the
(
PCCP Prize by the Royal Society of Chemistry (2013), the Tsukuba Encouragement Prize (2012), the
Ceramic Society of Japan (CerSJ) Award (2010), and the Inoue Research Award for Young Scientists
(
2010). Recently, he was selected as one of Australia’s Top 40 Researchers.
Dr. Jongbeom Na
Dr. Jongbeom Na received his Ph.D. degree (2017) from the Department of Chemical and Biomolecular
Engineering at Yonsei University (Republic of Korea). Until 2018, he worked as a Research Engineer at
Chemical Laboratory of SK Chemicals Co., Ltd. Currently, he is working as a research fellow at MANA, NIMS
(
Japan) and as a visiting academic at AIBN, the University of Queensland. His major research interest is in
the design and synthesis of functional nanomaterials, organic-inorganic hybrid materials, and energy
conversion-storage applications.
Abstract
cyclability, high power density, and considerable energy. In this
Miniaturized power supplies, such as microsupercapacitors,
are highly demanded in micro-electro mechanical systems
MEMS) and micro portable microdevices due to their superior
study, we utilize ZIF-8 derived carbon as a source of active
material to fabricate flexible microsupercapacitors via a simple
electrophoresis method. The deposited ZIF-8 derived carbon
(
176 | Bull. Chem. Soc. Jpn. 2020, 93, 176–181 | doi:10.1246/bcsj.20190298
© 2020 The Chemical Society of Japan

particles with high surface area play a decisive role in achiev-
ing high electrochemical performances. The simple and
straightforward process of electrophoretic deposition using
ZIF-8 derived carbon particles generates porous carbon films
on microsupercapacitors, which leads to a superior electrochem-
ical performance.
Keywords: Nanoporous carbons
j Porous materials j
Metal-organic frameworks
1
. Introduction
Figure 1. (a) Schematic of microsupercapacitor fabrication
via electrophoretic deposition, (b) schematic of flexible
interdigital finger electrode, and (c, d) SEM images of
deposited carbon particles on the patterned lines.
The advance of technologies in micro-electro-mechanical
systems (MEMS) and portable microdevices has realized the
integration of various technologies in miniaturized electronic
devices. It has allowed an enormous degree of freedom and
convenience towards a variety of applications such as envi-
ronmental monitoring systems, biosensors, wearable sensors,
and flexible displays.1 However, the development of smart
applications and technologies with MEMS and portable micro-
devices is limited by the lack of energy storage technologies.
Therefore, efficient energy storage systems are required to
increase the working period of microdevices.
and chemicals for ZIF-8 synthesis in the present study were
purchased from Sigma-Aldrich company and utilized without
any further treatment. In a typical synthesis method, 18.94 g
(100 mmol) of Zn(NO ) ¢6H O was dissolved in 500 mL dis-
­5
3
2
2
tilled water and dissolved adequately to obtain a clear solution.
Then, 2-methylimidazole (MIm) was added in the above solu-
tion and continuously stirred. The mole ratio of Zn(NO3)2¢
Micro-supercapacitors (MSCs) can miniaturize energy stor-
age devices that are highly useful to supply required electrical
energy to microdevices as they possess high capacitance, large
energy-density, and superior charge/discharge rates.6 MSCs
work based on the same type of electric charge storage mecha-
nisms a traditional supercapacitors, which are known as electric
6H O and MIm was controlled at 1:70 and 1:50 to prepare
2
different size ZIF-8 particles (average 350 nm and 1400 nm,
respectively) for 24 h. As-prepared ZIF-8 particles were collect-
ed by centrifugation and washed with distilled water and
ethanol several times. Finally, the ZIF-8 particles were dried at
50 °C under vacuum in an incubator for 24 h. For carboniza-
tion, as-synthesized ZIF-8 particles were placed into a porce-
lain boat in the tube furnace and pyrolyzed at 800 °C for 5 h,
­9
double-layer capacitors (EDLCs)1 and pseudocapacitors.
0,11
12,13
EDLCs store electrical charge via electrostatic adsorption/
desorption of electrolyte ions along the interfaces between elec-
trode and electrolyte, whereas pseudocapacitors store electrical
charge via surface redox reaction of electrode materials. Among
various electrode materials, nanoporous carbon materials can
have high surface areas and good electrical conductivities,
which enables their high specific capacitance via EDLC.
Metal-organic frameworks (MOFs) are highly porous and
¹
1
with a heating rate of 5 °C¢min in N atmosphere, resulting
2
in ZIF-8 derived carbon particles. Hereafter, the carbon parti-
cles of two different sizes are denoted as C350 and C1400,
according to the size of ZIF-8 particles, ca. 350 nm and ca.
1400 nm, respectively.
2.2 Fabrication of a Supercapacitor by Electrophoretic
Deposition.
A three-electrode setup was used to initially
ordered materials formed via coordination bonding between
evaluate the electrochemical properties of C350 and C1400 as
active materials for supercapacitors. Then flexible microsuper-
capacitors were fabricated to assess device performances.
metal ions and organic ligands.1
4,15
With their organic ligands
acting as carbon precursors, specific MOFs can give rise to
1
6­22
highly porous carbons upon high annealing temperature.
Three-Electrode Supercapacitor:
Polyethylene tereph-
ZIF-8 (zeolitic imidazolate framework-8) is one of the most
commonly utilized MOF species to produce porous ZIF-8
derived carbon with a high surface area. Herein, we fabricate
a microsupercapacitor deposited with ZIF-8 derived carbons
as active materials via an electrophoretic deposition method
thalate (PET) was selected as the substrate for a supercapacitor
due to its flexibility and chemical stability in most cases.
Before electrophoretic deposition, PET substrates were coated
with silver paste by brush and subsequent drying at 150 °C for
10 min. The C350 and C1400 particles were combined with a
suspension containing carbon particles to conduct electropho-
retic deposition. It was prepared as follows: Carbon particles
(0.2%wt.) and Mg(NO ) ¢6H O (0.02%wt.) were suspended in
distilled water-ethanol mixed solution (95%:5%). The suspen-
sion was sonicated for 8 h to disperse carbon particles suffi-
ciently. As a result, the suspension could remain stable for
seven days without precipitate at the bottom of the suspension,
which ensured the colloidal suspension was stable. The electro-
phoresis was carried out in a two-electrode system with the
suspension functioning as the electrolyte. The PET substrate
and Pt foil were employed as anode and cathode during electro-
phoretic deposition. In a typical deposition experiment, 15 V
(Figure 1a). The electrophoretic deposition method enables
binder-free and conductive area-specific fabrication of micro-
supercapacitors, which is hard to achieve with traditional drop-
casting methods. Here we describe the fabrication of flexible
microsupercapacitors and investigate their performance as
energy storage devices. As a result, they exhibit high power
density and high energy density with an outstanding capaci-
tance retention rate.
3
2
2
2
. Experimental
.1 Synthesis of Carbon Particles of Two Different
Diameters Derived from ZIF-8 Particles. The reagents
2
Bull. Chem. Soc. Jpn. 2020, 93, 176–181 | doi:10.1246/bcsj.20190298
© 2020 The Chemical Society of Japan | 177

Figure 2. (a­d) SEM images of two types of as-prepared
ZIF-8 particles with different particle sizes of (a, b) ca.
350 nm and (c, d) ca. 1400 nm. (e­h) SEM images of ZIF-8
derived carbon particles with different particle sizes ((e, f)
C350 and (g, h) C1400). (i) Wide-angle XRD patterns of
as-prepared ZIF-8 particles with different particle sizes
and ZIF-8 derived carbon particles (C350 and C1400).
(
j) Raman spectra of ZIF-8 derived carbon particles (C350
and C1400).
was applied between anode and cathode for 1 min. Then
deposited PET substrate was taken out to be washed with dis-
tilled water and dried at 60 °C for 50 min to obtain a binder-free
electrode.
Figure 3. Electrochemical performances of C350 and
C1400 samples in a three-electrode system. (a, b) CV
curves of (a) C350 and (b) C1400, (c, d) GCD profiles of
Flexible Microsupercapacitor:
The illustration in
Figure 1a describes the fabrication method used to create the
flexible microsupercapacitors. The electrophoretic deposition
process of the electrodes for flexible microsupercapacitor was
the same as the above section, except that the electrode pat-
tern was deposited on the PET substrate by applying silver
paste through a screen-printing mask. The final interdigitated
finger electrode figure can be seen in Figure 1b, which is denot-
ed as flexible microsupercapacitor (FSC) after dropping of
electrolyte.
(
c) C350 and (d) C1400, (e) specific capacitance variation
with increase in the applied current density, (f) AC imped-
ance plot of C350 and C1400 samples, and (g, h) relaxation
times of C350 and C1400 electrodes, respectively.
¹
1
potential range of ¹1.0­0.0 V, using scan rates from 0.2 V s
to 100 V s . Galvanostatic discharge-charge (GDC) tests were
conducted at the current densities from 5 A g to 100 A g .
The electrochemical impedance spectra (EIS) were measured
from 10 mHz to 100 kHz frequency with an amplitude of 5 mV.
¹
1
¹1
¹1
2
.3 Materials Characterizations. X-ray diffraction (XRD,
Rigak, Cu Kα radiation) was used to determine the structures
of ZIF-8 and its derived carbon particles. The morphology of
as-prepared particles was examined by scanning electron
microscopy (SEM, Hitachi, S-4800). The nitrogen adsorption-
desorption isotherms were conducted by utilizing a surface
area analysis apparatus (BET, Quantachrome Instruments,
AUTOSORB-1) at 77 K to analyze the surface areas and pores
size distribution of carbon particles. Micro-Raman spectrom-
eter with a 633 nm laser source (Horiba-Jobin Yvon T64000)
was used to study the carbon-related information of carbon
particles.
The gravimetric capacitance (C ) was calculated by dis-
charge profiles in the potential range using the following
equation:
g
I ꢀ t
Cg ¼
ð1Þ
W ꢀ ꢀU
where I is the discharge current, t is the duration of discharge,
W is the weight of the carbon materials on the electrode, and
ꢀU is the potential window of the discharge process. This
calculation was adopted in Figure 3c­d to obtain Figure 3e.
Flexible Microsupercapacitor: In the present study, solid
electrolyte was used with the FSC. The solid electrolyte was
formed by dropping liquid electrolyte onto the surface of as-
deposited patterned PET substrate and drying in air, which was
prepared by dissolving 3 g polyvinyl alcohol (PVA) and 3 g
KOH in 30 ml distilled water at 80 °C for 2 h with vigorous
stirring. CV measurements were carried out within a potential
range of 0.0­0.8 V (or 0.0­2.4 V for 3 FSC devices in series)
2
.4 Electrochemical Measurements.
Three-Electrode
Supercapacitor: All electrochemical measurements were car-
ried out on an electrochemical workstation (VMP3, Biological,
France). To measure the electrochemical performance of C350
and C1400 deposited PET electrodes, three electrode system
was utilized, with 6 M KOH solution as the electrolyte, Pt foil
as counter electrode and Ag/AgCl as the reference electrode.
Cyclic voltammetry (CV) curves were measured within the
¹
1
¹1
and the scan rates were set between 0.2 V s and 10 V s . The
178 | Bull. Chem. Soc. Jpn. 2020, 93, 176–181 | doi:10.1246/bcsj.20190298
© 2020 The Chemical Society of Japan

The size distributions of the particles are homogenous before
and after the carbonization step. ZIF-8 particles in Figure 2a­b
have particle sizes around 350 nm and demonstrate the typical
rhombic dodecahedral shape of zeolitic imidazolate frame-
works, thus implying successful morphology control in our
synthesis of ZIF-8. When the mole ratio of Zn(NO ) ¢6H O
3
2
2
and MIm is changed from 1:70 to 1:50, the size of ZIF-8
particles increases significantly to about 1400 nm and shows
smoother surface morphology in Figure 2c­d. The images of
carbonized particles are shown in Figure 2e­h, which prefer-
entially keep original rhombic dodecahedron shape as ZIF-8
particles. The morphology of carbon particles seems to have
slightly shrunk due to the structure variation during high-
temperature treatment.
Figure 2i shows the XRD patterns of ZIF-8 and its derived
carbon material. The diffraction peaks of ZIF-8 are all in good
accordance with the simulated pattern of the ZIF-8 structure,
which indicates high level of crystallization of as-prepared ZIF-
8
particles without impurities. After carbonization at 800 °C
for 5 h, the diffraction peaks of ZIF-8 structure disappear and
only amorphous peaks can be found at 2ª angle from 20° to
3
0°. From such amorphous peaks, it can be inferred that the
ZIF-8 particles have been transformed to carbon particles. The
graphitization degree of ZIF-8 derived carbon particles can be
distinguished from Raman patterns in Figure 2j. The positions
Figure 4. Electrochemical performances of FSC devices
with C350 as active material in a two-electrode system.
(a) CV curves of a single FSC device under different bend-
¹1
of D and G bands of C350 and C1400 are at about 1348 cm
ing angles, (b) photograph of the bendable single FSC
device, (c) CV curves of a single FSC device and 3
¹
1
and 1599 cm wavenumbers. The D band is generally believed
to represent the part of disordered or partially ordered structure
in carbon materials, while G band has a relationship with the
graphitization degree of carbon materials. The significant inten-
sity of the G band indicates a high level of graphitic content
and higher electrical conductivity. The relative intensity ratio
¹1
connected FSC devices in series with a scan rate of 1 V s
,
(
d) CV curves of 3 connected FSC devices in series at
¹1
¹1
different scan rates from 0.2 V s to 10 V s , (e) GCD
curves of a single FSC device and 3 connected FSC
¹2
devices in series at a current density of 0.14 mA cm , and
f) photograph of 3 connected FSC devices in series which
of I /I are respectively equal to 0.99 and 1.00 for C350 and
(
D
G
C1400 samples, suggesting that the disordered/amorphous
carbon and graphitic carbon are co-existing.
can generate LED lighting.
volumetric capacitance (C ) was calculated by taking the
integral of the cyclic voltammogram in the potential range
using the following equation:
The information on surface areas and pore size distribu-
tion of C350 and C1400 particles are studied via nitrogen
adsorption-desorption isothermal method. In Figure S1a,
adsorption-desorption isotherms of C350 and C1400 present
well-overlapped shape during the process of nitrogen adsorp-
tion and desorption. There is no visible hysteresis loop. The
pore size distribution of C350 and C1400 are displayed in
Figure S1b. It can be seen that a majority of pores in both
particles are micropores with diameter less than 2 nm, with only
some mesopores ranging between 3 and 4 nm present in C350
v
Q
Cv ¼
ð2Þ
2
V ꢀ ꢀU
where Q is the charge, V is the volume of the films deposited
on the substrate, and ꢀU is the potential window. This calcu-
lation was used in Figure 4d to obtain Figure S2.
Under a given scan rate, the power density Pv was calculated
by integrating the cyclic voltammogram plots. The energy den-
sity (Ev) was calculated according to the following equations:
2
¹1
particles. The surface area of C350 reaches 754.15 m g ,
2
¹1
which is higher than 684.14 m g of C1400. Furthermore, the
3
¹1
Z
pore volumes of C350 and C1400 are 0.452 cm g and 0.329
V0
3
¹1
Pv ¼
Ev ¼
I ꢀ UdU
ð3Þ
ð4Þ
cm g , respectively. The C350 sample has a higher surface
area and larger pore volume. This observation indicates that
particle size influences the carbonization of ZIF-8 which
ultimately affects porosity.
0
Pv ꢀ ꢀU
v ꢀ 3600
where ꢀU is the potential window of the discharge process and
v is the scan rate. This calculation was used in Figure 4d to
obtain Figure S4.
In Figure 3a­b, the CV curves under different scan rates
¹
1
¹1
from 0.2 V s to 5 V s are demonstrated. CV curves present
similar rectangle shapes for both C350 and C1400, which are
attributed to the double-layer capacitance of carbon materials.
Although the outlines of CV curves tend to deviate gradually
from rectangle shape at higher scan rates, the rectangle profiles
of CV can be roughly maintained even at high scan rate. It
3
. Results and Discussion
The SEM morphologies of as-synthesized ZIF-8 particles and
ZIF-8 derived carbon particles are presented in Figure 2a­h.
Bull. Chem. Soc. Jpn. 2020, 93, 176–181 | doi:10.1246/bcsj.20190298
© 2020 The Chemical Society of Japan | 179

implies stable and typical capacitance performances of our car-
bon materials. Galvanostatic discharge-charge (GDC) curves
under various current densities are presented in Figure 3c­d.
The charge and discharge processes all show nearly linear
profiles within ¹0.1­0.0 V (vs. Ag/AgCl), indicating typical
capacitive properties of C350 and C1400 samples.
characteristics of a supercapacitor. The CV curves of the FSC
under different bending angles are also shown in Figure 4a.
The CV curves overlap to a large extent when the bending
angle changes from 0° to 180°, indicating the excellent stability
of as-prepared FSC under bending. The image of bending the
FSC can be seen in Figure 4b. For flexible devices, the work
abilities under bending or twisting conditions are the key to
practical application.
The GDC discharge duration of C350 and C1400 electrodes
¹
1
are 48 seconds and 18 seconds at a current density of 5 A g ,
respectively. There is a apparent difference in discharge dura-
tion because the specific capacitance of the C350 material is
nearly three times higher than C1400. The variation of dis-
charge specific capacitance on current density is displayed in
To investigate the combined performance of the FSC, three
pieces of the FSC are connected in series and electrochemically
studied. The FSCs in series display stable electrochemical
processes within the 0.0 to 2.4 V voltage range in CV and GDC
measurements, as presented in Figure 4c­d and Figure 4e,
¹
1
Figure 3e. At a smaller current density (<5 A g ), the C350
and C1400 materials achieve high specific capacitance (e.g.,
¹
1
respectively. With the scan rate varying from 0.2 V s to 10
¹
1
¹1
¹1
3
89 F g and 105 F g , respectively). The specific capaci-
V s , the shapes of CV curves still maintain a roughly sym-
tances promptly decrease with the increase of current density.
metric rectangle. From CV measurements under different scan
rates (Figure 4d), we calculated the volumetric capacitances of
the FSC device, as shown in Figure S2. The volumetric capaci-
tance of FSC gradually decreases as the scan rate increases.
After connection of 3 FSC devices in series, the voltage win-
dows are expanded to 2.4 V, while the capacitance drops to one
third in comparison to a single FSC device according to the
eq (2), which was observed previously. Practically, the FSC
in series can successfully light an LED in Figure 4f, which is
an additional benefit obtained from the high voltage after con-
nection in series. At the same time, the long cycling perform-
ance of FSC in Figure S3 indicates its potential for electro-
chemical applications. The Ragone plot of the FSC device in
Figure S4 also reveals its good properties. Our FSC presents
obvious advantages over other flexible devices.
¹
1
When the current density is greater than 10 A g , the notable
drop of the specific capacitances stop, and the curves reach near
their plateaus. The specific capacitance of C350 remains 178
¹
1
¹1
F g even at a high current density of 100 A g , which is more
¹1
than three times than 58 F g of C1400. Therefore, C350
material has high specific capacitance and outstanding capaci-
tance retention capability at high current density.
2
3
EIS measurements were used to investigate the electrochem-
ical properties of C350 and C1400 as active materials for
supercapacitors. Figure 3f shows the Nyquist plots. The EIS
curves can be well fitted with an equivalent circuit in the inset
in Figure 3f. Rohm represents the ohm resistance of electrolyte
and connections in system etc., and Rct is the charge transfer
resistance. Q is defined as a constant phase angle element due
to the frequency response difference between real electrochem-
ical double-layer capacitance and the theoretical maximum
capacitance, which is utilized to simulate the capacitance prop-
4
. Conclusion
Microsupercapacitors with ZIF-8 derived carbon as active
materials have been fabricated via a simple electrophoresis
assembly method. This electrophoresis method is easy to con-
trol and thus able to provide a high-quality, uniform carbon
material with high surface area and good electrical conductiv-
ity. We have investigated the performance of these carbon
materials in microsupercapacitor devices. The flexible micro-
supercapacitors fabricated by electrophoresis also demonstrate
excellent electrochemical performance. Based on the simplicity
and convenience of the film making process and excellent
electrochemical properties, microsupercapacitors described
here are good candidate materials for future miniaturized or
flexible power supplies.
erties of the electrode. Z , called Warburg impedance, has a
W
relationship with the ion diffusion at low-frequency region.
Both C350 and C1400 show straight lines with large slopes in
the low-frequency region, which indicates excellent ion diffu-
sion conditions during the electrochemical process.
The EIS data in Figure 3g­h show that the C350 carbon
material has a shorter relaxation time (¸ ) of 348 ms than
0
C1400 carbon material whose relaxation time is 408 ms. Minor
relaxation time of active material is beneficial to the rapid
charge-discharge process and to achieve excellent capacitance
retention even under high current conditions, which corre-
sponds well with the results in Figure 3e that both C350 and
¹
1
C1400 can keep stable capacitance up to 100 A g current
density. As a result, as-synthesized C350 and C1400 carbon
materials are both quite suitable for acting as active electrode
materials in supercapacitors due to their large surface area,
massive micro/mesopores and short relaxation times. Espe-
cially, C350 carbon material has superior electrochemical
performances than that of C1400 and will be used in following
microsupercapacitor devices.
This research was supported by the Principal Research
Program (PNK5600) at the Korea Institute of Materials Science
(KIMS).
Supporting Information
This material is available on https://doi.org/10.1246/bcsj.
20190298.
The FSC was fabricated according to the indicative size in
Figure 1b. ZIF-8 derived carbon particles were successfully
deposited on the patterned lines, as shown in Figure 1c­d. The
interdigital finger outline of the electrode is beneficial to high
capacitance generation and its electrochemical performance.
The CV measurement results of the FSC indicate the expected
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