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Hexamethyldisilazane

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Name

Hexamethyldisilazane

EINECS 213-668-5
CAS No. 999-97-3 Density 0.776 g/cm3
PSA 12.03000 LogP 2.63670
Solubility REACTS Melting Point -78 °C
Formula C6H19NSi2 Boiling Point 126 °C at 760 mmHg
Molecular Weight 161.395 Flash Point 30 °C
Transport Information UN 3286 3/PG 2 Appearance colourless liquid
Safety 16-26-36/37/39-45 Risk Codes 11-20/21/22-34
Molecular Structure Molecular Structure of 999-97-3 (Hexamethyldisilazane) Hazard Symbols HarmfulXn; FlammableF; CorrosiveC
Synonyms

LS 7150;Lithium, (bis(trimethylsilyl)amino)-;Lithium tris(trimethylsilyl)amine;Silanamine, 1,1,1-trimethyl-N- (trimethylsilyl)-;Disilazane, 1,1,1,3,3,3-hexamethyl-;Bis(trimethylsilyl)amine;1,1,1,3,3,3-Hexamethyldisilazane;Lithiumbis(trimethylsilyl)amine;

Article Data 135

Hexamethyldisilazane Chemical Properties

IUPAC Name: [dimethyl-(trimethylsilylamino)silyl]methane 
Empirical Formula: C6H19NSi2
Molecular Weight: 161.3928 
EINECS: 213-668-5 
Structure of Hexamethyldisilazane (CAS NO.999-97-3):

Index of Refraction: 1.404
Molar Refractivity: 50.87 cm3
Molar Volume: 207.8 cm3
Polarizability: 20.16×10-24cm3
Surface Tension: 16.2 dyne/cm
Density: 0.776 g/cm3
Flash Point: 30 °C
Enthalpy of Vaporization: 36.38 kJ/mol 
Melting Point: -78 °C
Boiling Point: 126 °C at 760 mmHg
Vapour Pressure: 11.9 mmHg at 25°C 
Storage temp: 2-8°C
Water Solubility: REACTS
Sensitive: Moisture Sensitive 
Physical Appearance: Colorless liquid
Product Categories: Pharmaceutical Intermediates;Organics;Analytical Chemistry;Biochemistry;GC Derivatizing Reagents;Nucleosides, Nucleotides & Related Reagents;Protecting Agents for Hydroxyl and Amino Groups;Protecting Agents, Phosphorylating Agents & Condensing Agents;Si (Classes of Silicon Compounds);Silazanes;Silicon Compounds (for Synthesis);Silylation (GC Derivatizing Reagents);Si-N Compounds;Synthetic Organic Chemistry;Trimethylsilylation (GC Derivatizing Reagents);Blocking Agents;Protective Agents;Silylating Agents 
Canonical SMILES: C[Si](C)(C)N[Si](C)(C)C
InChI: InChI=1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
InChIKey: FFUAGWLWBBFQJT-UHFFFAOYSA-N
Synonyms of Hexamethyldisilazane (CAS NO.999-97-3): 1,1,1,3,3,3-Hexamethyldisilazane ; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine ; AI3-51467 ; Bis(trimethylsilyl)amine ; Hexamethylsilazane ; OAP ; SZ 6079 ; TSL 8802 ; Tri-Sil  

Hexamethyldisilazane Uses

In photolithography, Hexamethyldisilazane (CAS NO.999-97-3) is used in as an adhesion promoter for photoresist.
In electron microscopy, Hexamethyldisilazane (CAS NO.999-97-3) can be used as an alternative to critical point drying during sample preparation.
In pyrolysis-gas chromatography-mass spectrometry, Hexamethyldisilazane (CAS NO.999-97-3) added to the analyte to create sylilated diagnostic products during pyrolysis, in order to enhance detectability of compounds with polar functional groups.

Hexamethyldisilazane Production

 Hexamethyldisilazane (CAS NO.999-97-3) is prepared by treatment of trimethylsilyl chloride with ammonia:
2 (CH3)3SiCl + 3 NH3 → [(CH3)3Si]2NH + 2 NH4Cl 
Alkali metal bis(trimethylsilyl)amides result from the deprotonation of bis(trimethylsilyl)amine. For example lithium bis(trimethylsilyl)amide (LiHMDS) is prepared using butyl lithium:
[(CH3)3Si]2NH + BuLi → [(CH3)3Si]2NLi + C4H10

Hexamethyldisilazane Toxicity Data With Reference

Organism Test Type Route Reported Dose (Normalized Dose) Effect Source
guinea pig LD50 skin 1mL/kg (1mL/kg) BEHAVIORAL: TREMOR

BEHAVIORAL: MUSCLE WEAKNESS

SKIN AND APPENDAGES (SKIN): HAIR: OTHER
National Technical Information Service. Vol. OTS0537734,
mouse LC50 inhalation 12gm/m3/2H (12000mg/m3) BEHAVIORAL: GENERAL ANESTHETIC

CARDIAC: PULSE RATE

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION
Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986.
mouse LD50 intravenous > 100mg/kg (100mg/kg)   Interagency Collaborative Group on Environmental Carcinogenesis, National Cancer Institute, Memorandum, June 17, 1974Vol. 17JUN1974,
mouse LD50 oral 850mg/kg (850mg/kg) BEHAVIORAL: GENERAL ANESTHETIC

CARDIAC: PULSE RATE

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION
Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986.
mouse LDLo intraperitoneal 650mg/kg (650mg/kg) IMMUNOLOGICAL INCLUDING ALLERGIC: DECREASED IMMUNE RESPONSE Personal Communication from G.D. Stoner, Dept. of Community Medicine, School of Medicine, Univ. of California, La Jolla, CA 92037, May 25, 1975Vol. 27MAY1975,
rabbit LD50 oral 1100mg/kg (1100mg/kg) BEHAVIORAL: GENERAL ANESTHETIC

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION

CARDIAC: PULSE RATE
Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986.
rabbit LD50 skin 710uL/kg (0.71mL/kg) BEHAVIORAL: SOMNOLENCE (GENERAL DEPRESSED ACTIVITY)

GASTROINTESTINAL: OTHER CHANGES

LUNGS, THORAX, OR RESPIRATION: OTHER CHANGES
Acute Toxicity Data. Journal of the American College of Toxicology, Part B. Vol. 12, Pg. 576, 1993.
rat LC50 inhalation 8700mg/m3/4H (8700mg/m3) BEHAVIORAL: GENERAL ANESTHETIC

CARDIAC: PULSE RATE

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION
Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986.
rat LD50 intraperitoneal 800mg/kg (800mg/kg) BEHAVIORAL: TREMOR

BEHAVIORAL: MUSCLE WEAKNESS

SKIN AND APPENDAGES (SKIN): HAIR: OTHER
National Technical Information Service. Vol. OTS0537734,
rat LD50 oral 850mg/kg (850mg/kg) BEHAVIORAL: GENERAL ANESTHETIC

CARDIAC: PULSE RATE

LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION
Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986.

Hexamethyldisilazane Consensus Reports

Reported in EPA TSCA Inventory.

Hexamethyldisilazane Safety Profile

Moderately toxic by ingestion and intraperitoneal routes. Questionable carcinogen with experimental tumorigenic data. A dangerous fire hazard when exposed to heat or flame; can react vigorously with oxidizing materials. When heated to decomposition it emits toxic fumes of NOx.
Hazard Codes:  F,  C,  Xn
The Risk Statements information of  Hexamethyldisilazane (CAS NO.999-97-3):
11:  Highly Flammable 
34:  Causes burns 
20/21/22:  Harmful by inhalation, in contact with skin and if swallowed 
The Safety Statements information of  Hexamethyldisilazane (CAS NO.999-97-3):
16:  Keep away from sources of ignition - No smoking 
26:  In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 
45:  In case of accident or if you feel unwell, seek medical advice immediately (show label where possible) 
36/37/39:  Wear suitable protective clothing, gloves and eye/face protection 
RIDADR: UN 3286 3/PG 2
WGK Germany: 2
RTECS: JM9230000
F: 21
Hazard Note: Flammable
TSCA: Yes
HazardClass: 3
PackingGroup: II

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