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| CAS No.: | 999-97-3 |
|---|---|
| Name: | Hexamethyldisilazane |
| Article Data: | 135 |
| Molecular Structure: | |
|
|
|
| Formula: | C6H19NSi2 |
| Molecular Weight: | 161.395 |
| Synonyms: | LS 7150;Lithium, (bis(trimethylsilyl)amino)-;Lithium tris(trimethylsilyl)amine;Silanamine, 1,1,1-trimethyl-N- (trimethylsilyl)-;Disilazane, 1,1,1,3,3,3-hexamethyl-;Bis(trimethylsilyl)amine;1,1,1,3,3,3-Hexamethyldisilazane;Lithiumbis(trimethylsilyl)amine; |
| EINECS: | 213-668-5 |
| Density: | 0.776 g/cm3 |
| Melting Point: | -78 °C |
| Boiling Point: | 126 °C at 760 mmHg |
| Flash Point: | 30 °C |
| Solubility: | REACTS |
| Appearance: | colourless liquid |
| Hazard Symbols: |
 Xn;  F;  C
|
| Risk Codes: | 11-20/21/22-34 |
| Safety: | 16-26-36/37/39-45 |
| Transport Information: | UN 3286 3/PG 2 |
| PSA: | 12.03000 |
| LogP: | 2.63670 |
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Chemistry
IUPAC Name: [dimethyl-(trimethylsilylamino)silyl]methane
Empirical Formula: C6H19NSi2
Molecular Weight: 161.3928
EINECS: 213-668-5
Structure of Hexamethyldisilazane (CAS NO.999-97-3):
Index of Refraction: 1.404
Molar Refractivity: 50.87 cm3
Molar Volume: 207.8 cm3
Polarizability: 20.16×10-24cm3
Surface Tension: 16.2 dyne/cm
Density: 0.776 g/cm3
Flash Point: 30 °C
Enthalpy of Vaporization: 36.38 kJ/mol
Melting Point: -78 °C
Boiling Point: 126 °C at 760 mmHg
Vapour Pressure: 11.9 mmHg at 25°C
Storage temp: 2-8°C
Water Solubility: REACTS
Sensitive: Moisture Sensitive
Physical Appearance: Colorless liquid
Product Categories: Pharmaceutical Intermediates;Organics;Analytical Chemistry;Biochemistry;GC Derivatizing Reagents;Nucleosides, Nucleotides & Related Reagents;Protecting Agents for Hydroxyl and Amino Groups;Protecting Agents, Phosphorylating Agents & Condensing Agents;Si (Classes of Silicon Compounds);Silazanes;Silicon Compounds (for Synthesis);Silylation (GC Derivatizing Reagents);Si-N Compounds;Synthetic Organic Chemistry;Trimethylsilylation (GC Derivatizing Reagents);Blocking Agents;Protective Agents;Silylating Agents
Canonical SMILES: C[Si](C)(C)N[Si](C)(C)C
InChI: InChI=1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
InChIKey: FFUAGWLWBBFQJT-UHFFFAOYSA-N
Synonyms of Hexamethyldisilazane (CAS NO.999-97-3): 1,1,1,3,3,3-Hexamethyldisilazane ; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine ; AI3-51467 ; Bis(trimethylsilyl)amine ; Hexamethylsilazane ; OAP ; SZ 6079 ; TSL 8802 ; Tri-Sil
Uses
In photolithography, Hexamethyldisilazane (CAS NO.999-97-3) is used in as an adhesion promoter for photoresist.
In electron microscopy, Hexamethyldisilazane (CAS NO.999-97-3) can be used as an alternative to critical point drying during sample preparation.
In pyrolysis-gas chromatography-mass spectrometry, Hexamethyldisilazane (CAS NO.999-97-3) added to the analyte to create sylilated diagnostic products during pyrolysis, in order to enhance detectability of compounds with polar functional groups.
Production
Hexamethyldisilazane (CAS NO.999-97-3) is prepared by treatment of trimethylsilyl chloride with ammonia:
2 (CH3)3SiCl + 3 NH3 → [(CH3)3Si]2NH + 2 NH4Cl
Alkali metal bis(trimethylsilyl)amides result from the deprotonation of bis(trimethylsilyl)amine. For example lithium bis(trimethylsilyl)amide (LiHMDS) is prepared using butyl lithium:
[(CH3)3Si]2NH + BuLi → [(CH3)3Si]2NLi + C4H10
Toxicity Data With Reference
| Organism | Test Type | Route | Reported Dose (Normalized Dose) | Effect | Source |
|---|---|---|---|---|---|
| guinea pig | LD50 | skin | 1mL/kg (1mL/kg) | BEHAVIORAL: TREMOR BEHAVIORAL: MUSCLE WEAKNESS SKIN AND APPENDAGES (SKIN): HAIR: OTHER | National Technical Information Service. Vol. OTS0537734, |
| mouse | LC50 | inhalation | 12gm/m3/2H (12000mg/m3) | BEHAVIORAL: GENERAL ANESTHETIC CARDIAC: PULSE RATE LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION | Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986. |
| mouse | LD50 | intravenous | > 100mg/kg (100mg/kg) | Interagency Collaborative Group on Environmental Carcinogenesis, National Cancer Institute, Memorandum, June 17, 1974Vol. 17JUN1974, | |
| mouse | LD50 | oral | 850mg/kg (850mg/kg) | BEHAVIORAL: GENERAL ANESTHETIC CARDIAC: PULSE RATE LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION | Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986. |
| mouse | LDLo | intraperitoneal | 650mg/kg (650mg/kg) | IMMUNOLOGICAL INCLUDING ALLERGIC: DECREASED IMMUNE RESPONSE | Personal Communication from G.D. Stoner, Dept. of Community Medicine, School of Medicine, Univ. of California, La Jolla, CA 92037, May 25, 1975Vol. 27MAY1975, |
| rabbit | LD50 | oral | 1100mg/kg (1100mg/kg) | BEHAVIORAL: GENERAL ANESTHETIC LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION CARDIAC: PULSE RATE | Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986. |
| rabbit | LD50 | skin | 710uL/kg (0.71mL/kg) | BEHAVIORAL: SOMNOLENCE (GENERAL DEPRESSED ACTIVITY) GASTROINTESTINAL: OTHER CHANGES LUNGS, THORAX, OR RESPIRATION: OTHER CHANGES | Acute Toxicity Data. Journal of the American College of Toxicology, Part B. Vol. 12, Pg. 576, 1993. |
| rat | LC50 | inhalation | 8700mg/m3/4H (8700mg/m3) | BEHAVIORAL: GENERAL ANESTHETIC CARDIAC: PULSE RATE LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION | Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986. |
| rat | LD50 | intraperitoneal | 800mg/kg (800mg/kg) | BEHAVIORAL: TREMOR BEHAVIORAL: MUSCLE WEAKNESS SKIN AND APPENDAGES (SKIN): HAIR: OTHER | National Technical Information Service. Vol. OTS0537734, |
| rat | LD50 | oral | 850mg/kg (850mg/kg) | BEHAVIORAL: GENERAL ANESTHETIC CARDIAC: PULSE RATE LUNGS, THORAX, OR RESPIRATION: RESPIRATORY DEPRESSION | Gigiena Truda i Professional'nye Zabolevaniya. Labor Hygiene and Occupational Diseases. Vol. 30(5), Pg. 52, 1986. |
Consensus Reports
Reported in EPA TSCA Inventory.
Safety Profile
Moderately toxic by ingestion and intraperitoneal routes. Questionable carcinogen with experimental tumorigenic data. A dangerous fire hazard when exposed to heat or flame; can react vigorously with oxidizing materials. When heated to decomposition it emits toxic fumes of NOx.
Hazard Codes: 
F, 
C, 
Xn
The Risk Statements information of Hexamethyldisilazane (CAS NO.999-97-3):
11: Highly Flammable
34: Causes burns
20/21/22: Harmful by inhalation, in contact with skin and if swallowed
The Safety Statements information of Hexamethyldisilazane (CAS NO.999-97-3):
16: Keep away from sources of ignition - No smoking
26: In case of contact with eyes, rinse immediately with plenty of water and seek medical advice
45: In case of accident or if you feel unwell, seek medical advice immediately (show label where possible)
36/37/39: Wear suitable protective clothing, gloves and eye/face protection
RIDADR: UN 3286 3/PG 2
WGK Germany: 2
RTECS: JM9230000
F: 21
Hazard Note: Flammable
TSCA: Yes
HazardClass: 3
PackingGroup: II