6074-84-6

Basic information

• Product Name: TANTALUM ETHOXIDE
• Synonyms: ethanol,tantalum(5+)salt;TANTAL(V)-ETHOXID;TANTALUM PENTAETHOXIDE;TANTALUM(V) ETHOXIDE;TANTALUM ETHOXIDE;TANTALUM ETHYLATE;tantalum(5+) ethanolate;Tantalum(V) ethoxide, 99.98% metals basis
• CAS NO: 6074-84-6
• Molecular Formula: 5C₂H₅O*Ta
• Molecular Weight: 406.25
• EINECS: 228-010-2
• Product Categories: Catalysis and Inorganic Chemistry;Chemical Synthesis;Solution Deposition Precursors;Tantalum;TantalumMicro/Nanoelectronics;metal alkoxide;73: Tantalum;CVD and ALD Precursors by Metal;CVD and ALD Precursors Packaged for Deposition Systems;Micro &Nanoelectronics;New Products for Materials Research and Engineering;Vapor Deposition Precursors;Materials Science;Micro/NanoElectronics
• Mol File: 6074-84-6.mol
• Article Data: 4

Chemical Properties

• Melting Point: 21 °C(lit.)
• Boiling Point: 155 °C0.01 mm Hg(lit.)
• Flash Point: 87 °F
• Appearance: /liquid
• Density: 1.566 g/mL at 25 °C(lit.)
• Vapor Pressure: 82.8mmHg at 25°C
• Refractive Index: n20/D 1.487(lit.)
• Storage Temp.: 2-8°C
• Solubility: Soluble in organic solvents.
• Water Solubility: Decomposes in water. Soluble in organic solvents.
• Sensitive: Moisture Sensitive/Air Sensiti
• BRN: 3678999
• CAS DataBase Reference: TANTALUM ETHOXIDE(CAS DataBase Reference)
• NIST Chemistry Reference: TANTALUM ETHOXIDE(6074-84-6)
• EPA Substance Registry System: TANTALUM ETHOXIDE(6074-84-6)

Safety Data

• Hazard Codes: C,F
• Statements: 10-34
• Safety Statements: 16-26-36/37/39-45
• RIDADR: UN 2920 8/PG 2
• WGK Germany: 3
• F: 3-8-10-21
• TSCA: No
• HazardClass: 3
• PackingGroup: III
• Hazardous Substances Data: 6074-84-6(Hazardous Substances Data)

Usage

Description

Tantalum ethoxide can be used for the manufacture of tantalum (V) oxidethin-film materials using chemical vapor deposition, atomic layer deposition, and sol-gel processing. Those materials have applications in semiconductor, electrochromic and optical fields1,2,3. In research filed, it can be used for the synthesis of some novel compounds such as oxo-alkoxide-carboxylates like Ta4O4(OEt)8(OOCCH3)4 with special molecular structure2. It is also used to prepare tantalum oxide nanoparticles for the imaging cartilage4.

Reference

Sukanya Murali, ?, A. Anand Deshpande, and C. G. Takoudis. "Modeling of the Metalorganic Chemical Vapor Deposition of Tantalum Oxide from Tantalum Ethoxide and Oxygen." Industrial & Engineering Chemistry Research 44.16(2005): págs. 6387-6392. Dong, L. U., et al. "Synthesis Method and Application of Tantalum (Ⅴ) Ethoxide" Guangzhou Chemical Industry (2016). https://www.alfa.com/en/catalog/014643/

Chemical Properties

clear colorless to almost colorless liquid or

Uses

Different sources of media describe the Uses of 6074-84-6 differently. You can refer to the following data:
1. Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
2. Tantalum(V) ethoxide acts as a precursor used in the preparation of ultra thin films of tantalum oxide and other tantalum containing films, which finds application in semiconductors. It is also used to prepare tantalum oxide nanoparticles for the imaging cartilage.

General Description

Tantalum(V) ethoxide Ta(OC2H5)5 is a tantalum alkoxide that can be used as a precursor in the preparation of tantalum oxide by chemical vapor deposition (CVD). It has excellent volatility and thermal stability. It can be synthesized by anodic oxidation of tantalum plate in anhydrous ethanol.

Purification Methods

Purify it by distillation under reduced pressure. It aggregates in *C6H6,EtOH, MeCN, pyridine and diisopropyl ether. [Bradley et al. J Chem Soc 726 1955, Bradley et al. J Chem Soc 5 1956, Beilstein 1 IV 1312.]

InChI:InChI=1/5C2H6O.Ta/c5*1-2-3;/h5*3H,2H2,1H3;

Synthetic route

Ta(5+)*N(C3H7)(2-)*3N(C3H7)2(1-)=Ta(NC3H7){N(C3H7)2}3 → tantalum(V) ethoxide (6074-84-6)

Conditions	Yield
With ethanol In benzene reaction with ethanol in benzene at ambient temp.;;	100%
With ethanol In benzene reaction with ethanol in benzene at ambient temp.;;	100%

tantalum(V) oxide + oxygen (80937-33-3) → tantalum(V) ethoxide (6074-84-6)

Conditions	Yield
In gas

tantalum + ethanol (64-17-5) + lithium chloride → LiTa9H(μ3-O)4(μ-O)9(μ-OEt)6(OEt)15(EtOH) + tantalum(V) ethoxide (6074-84-6)

Conditions	Yield
In ethanol Electrolysis; anodic dissolution of the metal in anhyd. alcohol in presence of LiCl assupporting electrolite; EtOH was evapd. from resulting electrolyte, the Ta(OEt)5 was extd. from residue with hexane, on prolonged storage of liquid crude Ta(OEt)5 the second Ta-Li complex crystllized in minor yield; elem. anal.;

tantalum + ethanol (64-17-5) → tantalum(V) ethoxide (6074-84-6)

Conditions	Yield
With LiCl In ethanol Electrochem. Process; dry Ar atmosphere; anodic oxidation of Ta in LiCl2 soln.; distillation;

tantalum pentachloride (7721-01-9) → tantalum(V) ethoxide (6074-84-6)

Conditions	Yield
With ethanol; ammonia In benzene byproducts: NH4Cl; TaCl5 was treated with ethanol in benzene in presence of excess NH3, the NH4Cl was separated, the filtrate was evaporated under reduced pressure;; distillation under reduced pressure;;
With ethanol; NH3 In benzene byproducts: NH4Cl; TaCl5 was treated with ethanol in benzene in presence of excess NH3, the NH4Cl was separated, the filtrate was evaporated under reduced pressure;; distillation under reduced pressure;;

hexamethyldisilathiane (3385-94-2) + N,N,N,N,-tetramethylethylenediamine (110-18-9) + lithium methanolate (865-34-9) + tantalum(V) ethoxide (6074-84-6) → 3Li(1+)*TaS4(3-)*2(CH3)2NCH2CH2N(CH3)2=Li3{TaS4}*2(CH3)2NCH2CH2N(CH3)2

Conditions	Yield
In diethyl ether; acetonitrile byproducts: Me3SiOEt, Me3SiOMe; under N2; a soln. of Ta(OEt)5 in ether added to a soln. of LiOMe and (Me3Si)2S in CH3CN; mixt. stirred at room temp.; TMEDA added;; elem. anal.;;	80%

1,3,5,7,9,11,14-heptacyclohexyltricyclo[7.3.3.1(5,11)]heptasiloxaneendo-3,7,14-triol (188612-43-3, 47904-22-3) + tantalum(V) ethoxide (6074-84-6) → [Cy7Si7O12Ta(OEt)(μ-OEt)]2

Conditions	Yield
In toluene for 26h; Reflux;	80%

tantalum(V) ethoxide (6074-84-6) + triphenylbismuthane (603-33-8) + salicylic acid (69-72-7) → BiTa4(μ-O)4(sal)4(Hsal)3(Oi-Pr)4

Conditions	Yield
With Mg(OOCCH3)2 In toluene under Ar; suspn. of Bi deriv. and salicylic acid in PhMe refluxed for 1 h, concd. in vac., redissolved in 2-propanol, added Mg salt, added dropwise Ta ethoxide, left at room temp. for 14 d; filtered, redissolved in CH2Cl2, filtered (Celite), added hexane; elem. anal.;	62%
In toluene under Ar; react. of Bi deriv. with Ta ethoxide and ligand;	0%
With NaOOCCH3 In toluene under Ar; react. of Bi deriv. with Ta ethoxide and ligand;	0%

tantalum(V) ethoxide (6074-84-6) + triphenylbismuthane (603-33-8) + salicylic acid (69-72-7) → Bi2Ta2(μ-O)(sal)4(Hsal)4(OEt)2

Conditions	Yield
In toluene under Ar; suspn. of Bi deriv. and salicylic acid in PhMe refluxed for 1 h, cooled to room temp., added dropwise Ta ethoxide, stirred at room temp. for 24 h; concd. in vac., washed (Et2O), dried in vac., recrystd. from CH2Cl2/hexane; elem. anal.;	58%

1,1,3,3-tetraphenyldisiloxane-1,3-diol (1104-93-4) + tantalum(V) ethoxide (6074-84-6) → [{μ-(Ph2OSiO)2O}Ta(OEt)2(μ-OEt)]2

Conditions	Yield
In tetrahydrofuran at 20℃; for 48h;	34%

hexamethyldisilathiane (3385-94-2) + tetraethylammonium chloride (56-34-8) + tantalum(V) ethoxide (6074-84-6) → 4(C2H5)4N(1+)*Ta6S17(4-)*3CH3CN=((C2H5)4N)4[Ta6S17]*3CH3CN (95979-75-2)

Conditions	Yield
In acetonitrile byproducts: Me3SiOEt, Me3SiCl; a mixt. of Ta(OEt)5 and Et4NCl in MeCN was stirred at 50°C for 20-25 min, to the warm mixt. was added with stirring (Me3Si)2S, after it was cooled to room temp., the mixt. was stirred for 4-12 h; mixt. was filtered, ether was added, ppt. was recrystd. from MeCN; elem.anal.;	33%

tantalum(V) ethoxide (6074-84-6) + silica gel (112926-00-8, 7631-86-9) → Ta2O5/SBA-15

Conditions	Yield
Stage #1: tantalum(V) ethoxide; silica gel In methanol at 23℃; for 18.1667h; Stage #2: With oxygen at 450℃; for 4h;

water (7732-18-5) + tantalum(V) ethoxide (6074-84-6) + acetylacetone (123-54-6) → tantalum(V) oxide

Conditions	Yield
With laurylamine hydrochloride In water stirred at room temp. for 1 h, aged at 40°C for 1 d, kept at 80°C for 1 wk, dried at 80°C overnight, calcined at 650-800°C for 4 h; TGA, XRD, SEM, TEM;

water (7732-18-5) + tantalum(V) ethoxide (6074-84-6) → tantalum(V) oxide

Conditions	Yield
With hydroxypropyl cellulose (HPT) In ethanol ethoxide and water are separately dissolved in equal volumes of ethanol, HPT as dispersant is added in water-ethanol soln., the two soln. are rapidly mixed, ppt. is centrifugated, dried in air at 80°C and fired at 800°C in air (2 h);

oxygen (80937-33-3) + tantalum(V) ethoxide (6074-84-6) → tantalum(V) oxide

Conditions	Yield
In neat (no solvent) (Ar); Ta-compound kept in bubbler heated at 130°C; flowed into reactor by Ar; reactor temp. maintained at 15°C; O2 fed into reactor;

tantalum(V) ethoxide (6074-84-6) → tantalum carbide

Conditions	Yield
With acetylacetone; Sucrose In butan-1-ol Ta ethoxide and acetylacetone soln. refluxing (N2, 50°C, 1 h), saccharose addn., refluxing (80°C), partial evapn., fibre or film preparation, heat treatment (Ar, 500-1500°C, 1 h); X-ray diffraction, electron microscopy;
With benzene-1,2-diol; acetylacetone In butan-1-ol Ta ethoxide and acetylacetone soln. refluxing (N2, 50°C, 1 h), catechol addn., refluxing (80°C), partial evapn., fibre or film preparation, heat treatment (Ar, 500-1500°C, 1 h); X-ray diffraction, electron microscopy;
With ethylene glycol; acetylacetone In butan-1-ol Ta ethoxide and acetylacetone soln. refluxing (N2, 50°C, 1 h), ethylene glycol addn., refluxing (80°C), partial evapn., fibre or film preparation, heat treatment (Ar, 500-1500°C, 1 h); X-ray diffraction, electron microscopy;

barium 2-methoxyethoxide + water (7732-18-5) + tantalum(V) ethoxide (6074-84-6) + magnesium acetate (142-72-3, 92123-19-8) → (barium)(magnesium)0.33(tantalum)0.67O3

Conditions	Yield
In 2-methoxy-ethanol Mg(CH3OO)2 added to soln. of Ba salt; stirred for 1 h; mixed with Ta(OC2H5)5; stirred for 1 h; H2O (H2O:Ba molar ratio of 1:2) added; gel dried at 80°C; calcined at 300-600°C for 2 h; sintered (1450-1550°C, 2 h); annealed (1350°C, 5 h);

peroxo-polytungstic acid + dihydrogen peroxide (7722-84-1) + tantalum(V) ethoxide (6074-84-6) + tungsten (7440-33-7) → peroxo-polytungstic acid#dot Ta(5+)

Conditions	Yield
In ethanol; water; dihydrogen peroxide ethoxide dissolved in ethanol slowly added to H2O2/EtOH/H2O soln., ethanol evapd., addn. of ether to remove org. compd., H2O2 removed, filtration, addn. of peroxo-polytungstic acid soln., left sat room temp. for 24 h or more; dried at room temp.,;

lithium nitrate + tantalum(V) ethoxide (6074-84-6) → lithium tantalate

Conditions	Yield
In not given soln. of LiNO3 and Ta(OEt)5 is heated (resin method), resin is pyrolyzed and then calcined (1000 K for 12 h), resulting metal-oxide powder is pressed into pellets, sintered at 1400-1600K for 24 h; XRD;

1.3-butanediol (18826-95-4, 107-88-0) + tantalum(V) ethoxide (6074-84-6) → Ta(5+)*3OC2H5(1-)*2H(1+)*2CH2(O)CH2CH(O)CH3(2-)=Ta(OC2H5)3(CH2(OH)CH2CHOCH3)2

Conditions	Yield
In benzene Ta(OC2H5)5 was treated with 1,3-butanediol in benzene, exchange of 2 ethoxy groups;;

1.3-butanediol (18826-95-4, 107-88-0) + tantalum(V) ethoxide (6074-84-6) → tantalum(V) 1,3-butanediolate

Conditions	Yield
In benzene Ta(OC2H5)5 was treated with 1,3-butanediol in benzene, exchange of all ethoxy groups;;

1.3-butanediol (18826-95-4, 107-88-0) + tantalum(V) ethoxide (6074-84-6) → Ta(5+)*OC2H5(1-)*4H(1+)*4CH2(O)CH2CH(O)CH3(2-)=Ta(OC2H5)(CH2(OH)CH2CHOCH3)4

Conditions	Yield
In benzene Ta(OC2H5)5 was treated with 1,3-butanediol in benzene, exchange of 4 ethoxy groups;;

trimethylsilyl acetate (2754-27-0) + tantalum(V) ethoxide (6074-84-6) → Ta(5+)*2OC2H5(1-)*3(CH3)3SiO(1-)=Ta(OC2H5)2(OSi(CH3)3)3

Conditions	Yield
In cyclohexane Ta(OC2H5)5 reacted with trimethylsilyl acetate in the stoichiometric amounts in cyclohexane;;

trimethylsilyl acetate (2754-27-0) + tantalum(V) ethoxide (6074-84-6) → Ta(5+)*3OC2H5(1-)*2(CH3)3SiO(1-)=Ta(OC2H5)3(OSi(CH3)3)2

Conditions	Yield
In cyclohexane Ta(OC2H5)5 reacted with trimethylsilyl acetate in the stoichiometric amounts in cyclohexane;;

trimethylsilyl acetate (2754-27-0) + tantalum(V) ethoxide (6074-84-6) → Ta(5+)*4OC2H5(1-)*(CH3)3SiO(1-)=Ta(OC2H5)4(OSi(CH3)3)

Conditions	Yield
In cyclohexane Ta(OC2H5)5 reacted with trimethylsilyl acetate in the stoichiometric amounts in cyclohexane;;

trimethylsilyl acetate (2754-27-0) + tantalum(V) ethoxide (6074-84-6) → Ta(5+)*OC2H5(1-)*4(CH3)3SiO(1-)=Ta(OC2H5)(OSi(CH3)3)4

Conditions	Yield
In cyclohexane Ta(OC2H5)5 reacted with trimethylsilyl acetate in the stoichiometric amounts in cyclohexane;;

tantalum(V) ethoxide (6074-84-6) + 2,2-Dimethyl-1,3-propanediol (126-30-7) → Ta(5+)*OC2H5(1-)*4(CH3)2C(CH2OH)(CH2O)(1-)=Ta(OC2H5)((CH3)2C(CH2OH)(CH2O))4

Conditions	Yield
In benzene Ta(OC2H5)5 was treated with neopentyl glycol in benzene, exchange of 4 ethoxy groups;;

tantalum(V) ethoxide (6074-84-6) + 2,2-Dimethyl-1,3-propanediol (126-30-7) → Ta(5+)*3OC2H5(1-)*2(CH3)2C(CH2OH)(CH2O)(1-)=Ta(OC2H5)3((CH3)2C(CH2OH)(CH2O))2

Conditions	Yield
In benzene Ta(OC2H5)5 was treated with neopentyl glycol in benzene, exchange of 2 ethoxy groups;;

tantalum(V) ethoxide (6074-84-6) + 2,2-Dimethyl-1,3-propanediol (126-30-7) → tantalum(V) neopentyl glycolate

Conditions	Yield
In benzene Ta(OC2H5)5 was treated with neopentyl glycol in benzene, exchange of all ethoxy groups;;

Upstream product

• 80937-33-3 oxygen 
• 64-17-5 ethanol 
• 7721-01-9 tantalum pentachloride 

Relevant articles and documents

In-situ monitoring of chemical vapor deposition at ambient pressure by surface-enhanced raman spectroscopy: Initial growth of tantalum(V) oxide on platinum [1]

-

Synthesis and structural study of polynuclear lithium oxoethoxo tantalates

LiTa9O13(OEt)20·2EtOH (I) is a side product of the electrochemical synthesis of Ta(OEt)5 carried out using LiCl as a supporting electrolyte. This product crystallizes in a minor yield upon the storage of crude liquid Ta(OEt)5. Treatment of I with a hot ethanol solution of LiOEt yields Li8Ta8O 14(OEt)20·12EtOH (II). The structures of I and II have been determined using X-ray crystallography. Molecule I, LiTa 9H(μ3-O)4(μ-O)9(μ-OEt) 6(OEt)15(EtOH), is located on a threefold axis that passes through the lithium atom, which coordinates one disordered solvation ethanol molecule and three μ3-oxo groups belonging to the [Ta 6O6(OR)15] ring fragment made of six octahedra. The next layer is formed by the [Ta3O7(OR)6] fragment made of three octahedra linked to the previous fragment through six μ-oxo ligands. In molecule II, Li8Ta8H 8(μ4-O)2(μ3-O) 8(μ-O)4(μ3-OEt)2(μ-OEt) 10(OEt)16·4EtOH, one can distinguish two groups of four [TaO6] octahedra that form [Ta4] tetrahedra sharing two vertices represented by μ4-oxo groups. Four Li atoms are located between the [Ta4] tetrahedra thus forming a interlayer comprising two distorted [LiO4] tetrahedra and two distorted [LiO5] tetragonal pyramids. The other four tetrahedrally coordinated Li atoms are located on the periphery of the molecule and are linked through [O(OR)] edges with Ta atoms. Each Ta atom coordinates three terminal OR groups and one μ-OR group. Four solvation ethanol molecules are hydrogen-bonded with the terminal OR groups at Ta atoms.