Energetics and dynamics in the reaction of Si+ with SiF4. Thermochemistry of SiFx and SiF+x (x=1, 2, 3)

Article abstract of DOI:10.1063/1.454387

The title reaction is studied using guided ion beam mass spectrometry.Absolute reaction cross sections are measured as a function of kinetic energy from thermal to 40 eV, and three endothermic product channels are observed.The dominant SiF+ + SiF3 channel is only slightly endothermic, while the SiF3⁺ + SiF and SiF2⁺ + SiF2⁺ channels have much higher thresholds.The SiF3⁺ cross section magnitude is about half that of SiF+, while the SiF2⁺ cross section is an order of magnitude smaller than that of SiF+.A second feature which appears in the SiF2⁺ cross section is due to dissociation of SiF3⁺ .There is evidence that SiF+ and SiF3⁺ are produced via a direct mechanism.Competition between these two channels is interpreted in terms of molecular orbital correlations and qualitative potential energy surfaces.One surface is found to correlate only with the SiF3⁺ + SiF channel, while another correlates diabatically with this channel and adiabatically with the SiF+ + SiF3 channel.Competition on this latter surface has an energy dependence which is consistent with the Landau-Zener model.Reaction thresholds are analyzed to yield 298 K heats of formation for SiFx and SiFx⁺ species.From an evaluation of these and literature values, we recommend the following values:

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Full text of DOI:10.1063/1.454387

Energetics and dynamics in the reaction of Si+ with SiF4. Thermochemistry of SiF x  

and SiF+ x (x=1, 2, 3)  

M. E. Weber and P. B. Armentrout  

Citation: The Journal of Chemical Physics 88, 6898 (1988); doi: 10.1063/1.454387  

View online: http://dx.doi.org/10.1063/1.454387  

View Table of Contents: http://scitation.aip.org/content/aip/journal/jcp/88/11?ver=pdfcov  

Published by the AIP Publishing  

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Full text of DOI:10.1063/1.454387

Energetics and dynamics in the reaction of Si+ with SiF4. Thermochemistry of SiF x
and SiF+ x (x=1, 2, 3)
M. E. Weber and P. B. Armentrout
Citation: The Journal of Chemical Physics 88, 6898 (1988); doi: 10.1063/1.454387
View online: http://dx.doi.org/10.1063/1.454387
View Table of Contents: http://scitation.aip.org/content/aip/journal/jcp/88/11?ver=pdfcov
Published by the AIP Publishing
Articles you may be interested in
CF, CF2, and SiF densities in inductively driven discharges containing C2F6, C4F8, and CHF3
J. Appl. Phys. 89, 900 (2001); 10.1063/1.1332092
Chemical reaction dynamics of F atom reaction with the dimer reconstructed Si{100}(2×1) surface
J. Vac. Sci. Technol. A 8, 3496 (1990); 10.1116/1.576538
Dissociation energetics of SiF systems of relevance to etching reactions
J. Chem. Phys. 87, 1307 (1987); 10.1063/1.453706
Dynamics of the reaction O(1 D 2)+H2→OH(X 2Π,v‘=2,3)+H: Full characterization of product energetics
J. Chem. Phys. 86, 3253 (1987); 10.1063/1.451984
The application of the kinetics of Si and SiF in specific electronic states to an investigation of the pumping of
a population inversion in the molecule, SiF.
AIP Conf. Proc. 146, 169 (1986); 10.1063/1.35839
This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.18.123.11 On: Sun, 21 Dec 2014 00:20:35

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.18.123.11 On: Sun, 21 Dec 2014 00:20:35

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.18.123.11 On: Sun, 21 Dec 2014 00:20:35

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.18.123.11 On: Sun, 21 Dec 2014 00:20:35

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.18.123.11 On: Sun, 21 Dec 2014 00:20:35

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.18.123.11 On: Sun, 21 Dec 2014 00:20:35

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.18.123.11 On: Sun, 21 Dec 2014 00:20:35

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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