Full text of DOI:10.1063/1.104182

Microwave plasma generation of arsine from hydrogen and solid arsenic
Thomas R. Omstead, Ananth V. Annapragada, and Klavs F. Jensen
Citation: Applied Physics Letters 57, 2543 (1990); doi: 10.1063/1.104182
View online: http://dx.doi.org/10.1063/1.104182
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/57/24?ver=pdfcov
Published by the AIP Publishing
Articles you may be interested in
Nanoparticle plasma ejected directly from solid copper by localized microwaves
Appl. Phys. Lett. 95, 191501 (2009); 10.1063/1.3259781
Vacancy generation resulting from electrical deactivation of arsenic
Appl. Phys. Lett. 67, 3575 (1995); 10.1063/1.115322
Passivation of zinc acceptors in InP by atomic hydrogen coming from arsine during metalorganic vapor phase
epitaxy
Appl. Phys. Lett. 53, 758 (1988); 10.1063/1.99824
Vibrational and rotational relaxation of arsine in the solid state
J. Chem. Phys. 67, 4279 (1977); 10.1063/1.435366
Equilibrium in the Exchange of Hydrogen between Arsine and Water
J. Chem. Phys. 31, 889 (1959); 10.1063/1.1730544
This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.88.90.110 On: Fri, 19 Dec 2014 12:07:14

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.88.90.110 On: Fri, 19 Dec 2014 12:07:14

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.88.90.110 On: Fri, 19 Dec 2014 12:07:14

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
130.88.90.110 On: Fri, 19 Dec 2014 12:07:14