Journal of the Electrochemical Society p. 2835 - 2840 (1989)
Update date:2022-08-28
Topics:
Nguyen
Albaugh
The physical and bonding properties of electron cyclotron resonance (ECR) plasma-deposited silicon nitride and oxide films deposited in many commercial ECR deposition systems were analyzed using various analytical techniques. ECR films deposited at room t
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