Efficient chemical vapour deposition of hydrocarbon polymeric films by UV laser induced photolysis of 3-butyn-2-one

Article abstract of DOI:10.1016/0009-2614(96)01076-7

ArF and XeCl laser induced photolysis of 3-butyn-2-one in the gas phase affords ethane, buta-1,3-diyne, ethyne and methane as minor gaseous products and a thin film of a carbon-rich organic polymer as a major product. The reaction is suitable for low-temperature chemical vapour deposition of adhesive hydrocarbon films.