Full text of DOI:10.1063/1.99581

Diffusion suppression of photolytic fragments on laserinduced chemical vapor
deposition
Yoshimitsu Arai, Satoru Yamaguchi, and Takaaki Ohsaki
Citation: Applied Physics Letters 52, 2083 (1988); doi: 10.1063/1.99581
View online: http://dx.doi.org/10.1063/1.99581
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/52/24?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
131.230.73.202 On: Thu, 18 Dec 2014 10:33:17

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
131.230.73.202 On: Thu, 18 Dec 2014 10:33:17

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
131.230.73.202 On: Thu, 18 Dec 2014 10:33:17