Full text of DOI:10.1063/1.108348

Liquid precursor twostep aluminum thinfilm deposition on KrFlaser patterned
palladium
O. Lehmann and M. Stuke
Citation: Applied Physics Letters 61, 2027 (1992); doi: 10.1063/1.108348
View online: http://dx.doi.org/10.1063/1.108348
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/61/17?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.88.90.140 On: Tue, 09 Dec 2014 12:38:19
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.88.90.140 On: Tue, 09 Dec 2014 12:38:19
1

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.88.90.140 On: Tue, 09 Dec 2014 12:38:19
1