
Journal of the Electrochemical Society p. 195 - 198 (1987)
Update date:2022-08-17
Topics:
Bhat
Taskar
Ghandhi
In this paper are presented some experimental results to explain mechanisms involved in the growth of CdTe by organometallic vapor-phase epitaxy (OMVPE). A pyrolysis study of dimethylcadmium (DMCd) was conducted in an OMVPE reactor, in the temperature range 230 degree -400 degree C. It was found that dimethylcadmium decomposes above approximately 230 degree C and the reaction is heterogeneous from 230 degree to 370 degree C. CdTe growth was also studied over a range of temperature from 300 degree to 375 degree C and for various reactor parameters. In all cases, the CdTe deposition rate was found to be closely related to the decomposition of dimethylcadmium.
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