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Name	PHOSPHORIC ACID, TRIS(TRIMETHYLSILYL) ESTER	EINECS	234-028-1
CAS No.	10497-05-9	Density	0.945 g/mL at 25 °C(lit.)
PSA	54.57000	LogP	4.64900
Solubility	935.5μg/L at 20℃	Melting Point	3-4 °C(lit.)
Formula	C9H27 O4 P Si3	Boiling Point	228-229 °C720 mm Hg(lit.)
Molecular Weight	314.541	Flash Point	76 °F
Transport Information	UN 1993 3	Appearance	N/A
Safety	Moderately toxic by ingestion. When heated to decomposition it emits toxic fumes of PO_x. See also ESTERS.	Risk Codes	11-36/37/38
Molecular Structure		Hazard Symbols	FXi
Synonyms	Silanol,trimethyl-, phosphate (3:1) (8CI,9CI); Tris(trimethylsiloxy)phosphine oxide;Tris(trimethylsilyl) phosphate	Article Data	40

PHOSPHORIC ACID, TRIS(TRIMETHYLSILYL) ESTER Synthetic route

: 3385-94-2
hexamethyldisilathiane

A: 10497-05-9
Tris(trimethylsilyl) phosphate

B: 20152-28-7
O,O,O-tris(trimethylsilyl) phosphorothioate

Conditions

Conditions	Yield
With phosphorus pentoxide at 170 - 180℃; for 10h;	A 85% B 98%

: potassium dihydrogenphosphate

: 75-77-4
chloro-trimethyl-silane

: 10497-05-9
Tris(trimethylsilyl) phosphate

Conditions

Conditions	Yield
In formamide for 1h; Inert atmosphere; Schlenk technique;	98%

: 107-46-0
Hexamethyldisiloxane

: N-trimethylsilyldihydropyrrole

: 10497-05-9
Tris(trimethylsilyl) phosphate

Conditions

Conditions	Yield
Stage #1: Hexamethyldisiloxane With phosphoric acid at 160 - 170℃; under 4500.45 - 6000.6 Torr; for 5h; Autoclave; Reflux; Stage #2: N-trimethylsilyldihydropyrrole at 100℃; under 760.051 Torr;	96.52%

: 75-77-4
chloro-trimethyl-silane

: 10497-05-9
Tris(trimethylsilyl) phosphate

Conditions

Conditions	Yield
With potassium dihydrogenphosphate In hexane Reflux;	96%
With ammonium dihydrogen phosphate at 78℃; for 3h; Temperature; Reagent/catalyst; Time;	89.6%
With phosphoric acid
With phosphoric acid Schlenk technique; Inert atmosphere;
With phosphoric acid Inert atmosphere;

: 999-97-3
1,1,1,3,3,3-hexamethyl-disilazane

H3PO4: H3PO4

: 10497-05-9
Tris(trimethylsilyl) phosphate

Conditions

Conditions	Yield
With saccharin In acetonitrile for 1h; Heating;	93%

: 14468-90-7
N-trimethylsilyl-pyrrolidin-2-one

: 10497-05-9
Tris(trimethylsilyl) phosphate

Conditions

Conditions	Yield
With lithium dihydrogenphosphate at 20℃; for 1h;	86%

: 53380-41-9
tetrakis(trimethylsiloxy)phosphonium iodide

A: 16029-98-4
trimethylsilyl iodide

B: 10497-05-9
Tris(trimethylsilyl) phosphate

Conditions

Conditions	Yield
In benzene Heating; during 5 h the solvent was distilled off, the temp. rose to 110 deg C;	A n/a B 85%

: 1416767-26-4
C22H50O10P2SSi5

A: 10497-05-9
Tris(trimethylsilyl) phosphate

B: 1416767-27-5
bis(trimethylsilyl) (1,1-dioxido-3Н-2,1-benzoxathiol-3-yl)phosphonate

Conditions

Conditions	Yield
at 90 - 110℃; under 1 Torr;	A n/a B 52%

: 10416-59-8
N,O-bis-(trimethylsilyl)-acetamide

: 10497-05-9
Tris(trimethylsilyl) phosphate

Conditions

Conditions	Yield
With trichlorophosphate at 120℃; for 1h;	26%

: 1795-31-9
tris(trimethylsilyl) phosphite

: 10497-05-9
Tris(trimethylsilyl) phosphate

Conditions

Conditions	Yield
With trityl-glycidol at 130 - 150℃;	24%
With styrene oxide at 130 - 150℃;

PHOSPHORIC ACID, TRIS(TRIMETHYLSILYL) ESTER Chemical Properties

IUPAC Name: Tris(trimethylsilyl) phosphate
Synonyms: Phosphoric acid tris(trimethylsilyl) ester ; Timtec-bb sbb001292 ; Tris(trimethylsilyl) phosphate ; Ester ; Phosphoric acid, tms ; Phosphoric acid, tristrimethylsilyl ; Phosphoric acid, tritms ; Silanol, trimethyl-, phosphate (3:1)
Product Categories: Si (Classes of Silicon Compounds);Silicon Compounds (for Synthesis);Silyl Esters;Si-O Compounds;Synthetic Organic Chemistry
CAS NO: 10497-05-9
Molecular Formula of Phosphoric acid, tris(trimethylsilyl) ester (CAS NO.10497-05-9) : C₉H₂₇O₄PSi₃
Molecular Weight of Phosphoric acid, tris(trimethylsilyl) ester (CAS NO.10497-05-9) :314.54
Molecular Structure of Phosphoric acid, tris(trimethylsilyl) ester (CAS NO.10497-05-9) :
EINECS: 234-028-1
Mol File: 10497-05-9.mol
Index of Refraction: 1.414
Surface Tension: 20.7 dyne/cm
Density: 0.96 g/cm³
Flash Point: 110.8 °C
Enthalpy of Vaporization: 44.85 kJ/mol
Boiling Point: 230.8 °C at 760 mmHg
Vapour Pressure: 0.0977 mmHg at 25°C
Melting point: 3-4 °C(lit.)

PHOSPHORIC ACID, TRIS(TRIMETHYLSILYL) ESTER Toxicity Data With Reference

orl-rat LD50:3440 mg/kg

MarJV# Personal Communication from Josef V. Marhold, VUOS, 539-18, Pardubice, Czechoslovakia, to the Editor of RTECS, Cincinnati, OH, March 29, 1977 29MAR77 .

PHOSPHORIC ACID, TRIS(TRIMETHYLSILYL) ESTER Consensus Reports

Reported in EPA TSCA Inventory.

PHOSPHORIC ACID, TRIS(TRIMETHYLSILYL) ESTER Safety Profile

Moderately toxic by ingestion. When heated to decomposition it emits toxic fumes of PO_x. See also ESTERS.
Hazard Codes F, Irritant Xi
Risk Statements 11-36/37/38
R11:Highly flammable.
R36/37/38:Irritating to eyes, respiratory system and skin.
Safety Statements 16-26-36
S16:Keep away from sources of ignition.
S26: In case of contact with eyes, rinse immediately with plenty of water and seek medical advice.
S36:Wear suitable protective clothing.
RIDADR UN 1993 3/PG 2
WGK Germany 2
RTECS TC9700000
F 10-21
TSCA Yes
HazardClass 3.2
PackingGroup III

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