Corrosion of porous silicon in Tetramethylammonium hydroxide (cas 105468-35-7) solution

Add time:07/21/2019    Source:sciencedirect.com

Corrosion of porous silicon in Tetramethylammonium hydroxide (cas 105468-35-7) (TMAH) solution was studied using weight loss measurements and scanning electron microscope. The effects of temperature, concentration of TMAH and volume ratio of ethanol in 1.0 M TMAH on corrosion rate and corrosion time were elaborately investigated. The residue of corrosion products were characterized as a mixture of [(CH3)4N]2SiO3 and SiO2. A comparative test among TMAH, KOH and NaOH illustrated that the 1.0 M TMAH could act as an applicable and novel corrosion solution to remove porous silicon layer for determining the porosity of porous silicon.

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