The adhesion strength and mechanical properties of SiC films deposited on SIALON (cas 112760-32-4) buffer layer by magnetron sputtering

Add time:07/31/2019    Source:sciencedirect.com

Herein, SiC films were prepared by DC pulse magnetron sputtering on ceramic substrates using SIALON (cas 112760-32-4) as buffer layer. The influence of SiAlON buffer layer thickness on the structural, morphological, and mechanical properties of the SiC/SiAlON bilayers was discussed. The result show that SiAlON buffer layer can effectively improve the adhesion strength of SiC films, while the hardness of the SiC/SiAlON bilayers isn't suppressed a lot. With increase in the buffer layer thickness, the film's adhesion strength gradually increases from 66 N to 83 N, which is much higher than 36 N of single SiC layer. Meanwhile, all the SiC/SiAlON films maintain great hardness between 20 GPa and 25 GPa.

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