Rapid deposition and thermoelectric properties of YTTERBIUM BORIDE (cas 12008-33-2) thin films using hybrid physical chemical vapor deposition

Add time:07/24/2019    Source:sciencedirect.com

Thin films of YbB4 and YbB6 have been deposited on sapphire substrates via hybrid physical chemical vapor deposition (HPCVD) using elemental ytterbium and decaborane, B10H14, as sources. The deposition condition dependence of the composition, purity, crystallinity and electrical properties has been investigated using x-ray diffraction (XRD), reflection high-energy diffraction (RHEED), profilometry and thermoelectric property measurements. A YbB6 thin film (∼2.5 µm) was produced with a power factor reaching ca. 200 µW m−1 K−2 at the highest investigated temperature, 563 K. Such performance slightly surpasses that of bulk material and offers a positive prospect for high-temperature thermoelectric application.

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