A dual ion source to produce Cs+ or I− ions for secondary ion mass spectrometry

Add time:08/26/2019    Source:sciencedirect.com

Negative primary ions have an advantage for SIMS measurements when positive secondary ions are being observed, because they gain energy from the secondary ion accelerating voltage. Having both Cs+ and I− ions available from the same ion source enables maximum bombarding energy to be obtained for both positive and negative secondary ion spectra without interrupting the vacuum.

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