Resist polymers: Part VIII—Thermolysis of bromine-containing acrylate polymers

Add time:09/06/2019    Source:sciencedirect.com

The thermal stability and degradation behaviour of poly(2-bromoethyl methacrylate (PBEMA), poly(2,3-dibromopropyl methacrylate) (PDBPMA), poly(methyl-α-bromoacrylate) (PMBA) and their copolymers have been investigated by thermogravimetric analysis in nitrogen and rapid pyrolysis in helium. Both ester decomposition and main chain scission occur for the bromo methacrylate polymers, with the former playing the dominant role. On the other hand, PMBA and its copolymer yield methyl bromide as the principal product. Possible mechanisms of formation of these products are suggested and discussed in the light of the experimental evidence. The thermolysis results are compared with radiolysis results.

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