Synthesis of hafnium(IV) β-ketoiminates as potential precursors for the MOCVD of HfO2

Add time:09/08/2019    Source:sciencedirect.com

An amine-elimination pathway has been used to produce two new hafnium compounds starting from the tetrakis(dimethylamido)hafnium(IV) complex and an amine – bis[(Z)-4-(2,6-dimethylphenylamino)pent-3-en-2-one]bis(dimethylamido)hafnium(IV) and [(Z)-4-(4-methylphenylamino)pent-3-en-2-one]bis(dimethylamido)hafnium(IV). The resulting complexes were characterized by single crystal X-ray diffraction and NMR. In addition, their volatilities were studied by thermogravimetric analysis (TGA), where [(Z)-4-(4-methylphenylamino)pent-3-en-2-one]bis(dimethylamido)hafnium(IV) showed better properties for MOCVD applications with a ΔHsub of 27 kJ/mol and a Tsub of 104 °C.

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