Vapour deposited boron nitride thin films

Add time:09/25/2019    Source:sciencedirect.com

Boron nitride (BN) thin films have attracted a great deal of interest in recent years for their mechanical, optical and electronic properties. Many physical as well as chemical vapour deposition processes have been explored for the synthesis of BN coatings, especially cubic boron nitride — which is the second hardest known material next to diamond. These techniques, however, suffer limitations due to the requirements of high substrate temperature and/or the necessity of using toxic starting materials. This paper reviews boron nitride films grown from the vapour phase by either pvd or cvd methods including plasma assisted and ion beam depositions. Recent results on the preparation and properties of BN thin films are also reviewed and emphasis is placed on the relationship between properties, especially hardness and microstructures.

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