Yttrium oxide (cas 1314-36-9) film for protecting quartz glass surface from etching by long-term exposure to chlorine trifluoride gas at room temperature

Add time:07/17/2019    Source:sciencedirect.com

The anticorrosive property of Yttrium oxide (cas 1314-36-9) was evaluated using chlorine trifluoride gas. After the exposure to chlorine trifluoride gas at room temperature for the total time longer than 1000 min, the yttrium oxide film, formed on a quartz glass surface, did not show any etching behavior and surface morphology change, while the non-coated quartz glass showed a rough surface with the etching depth of nearly 0.1 mm. Because yttrium oxide had no chemical reaction with chlorine trifluoride gas at temperatures less than 300 °C, yttrium oxide film is expected to protect the quartz glass from etching by chlorine trifluoride gas at room temperature for a significantly long time.

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