100
est because Mansour and Ugolini [24] observed that the C 1s
peak shifts toward a higher binding energy, but the binding
energy of N 1s remains constant as the nitrogen concentration
is increased in their a-CNx:H films. The reason for this might
be due to the quite different nitrogen content presented in the
two works. The remaining C-C phase would influence the ob-
taining of reliable information on the C−N bonding structure
by using XPS.
structure is the regions II and III. The region I is hardly dis-
tinguished from the slope of the region II and the region IV
appears as a small shoulder of the region III. These features
are consistent with the reference spectra in [29, 30]. How-
ever, it can be clearly seen that quite different features appear
in the valence-band spectra when a large amount of nitrogen
was introduced into the films. The position and peak inten-
sity of these regions change with the increase of nitrogen
content, especially for regions I and IV. The peak position
changes in the same manner as that of the XPS core-level
spectra shown in Figs. 3 and 4. That is, for the film with
more nitrogen, the valence bands appear in higher binding
energy. A more apparent feature is the change of peak in-
tensity of the regions I and IV. With increase of nitrogen in
the films, the regions I and IV become more apparent and
the intensity increases. It implies a strong structural change
in these samples induced by the nitrogen incorporation. Due
to the existence of nitrogen and the formation of carbon–
nitrogen bonding, N 2s, N 2p and the corresponding s-p hy-
bridized bonding states appear in the valence-band spectra
with positions very close to those of carbon. We know that
the binding energies of the valence bands of nitrogen are
almost 2 eV (2p states) and 1.3 eV (2s states) higher than
those of carbon; therefore, it is not difficult to understand the
upper shift of the regions I and IV with increase of the ni-
trogen content. Moreover, because the photoemission cross
section of N 2s and N 2p (0.0841, 0.0025, and 0.0049 for
2s1/2, 2p1/2, and 2p3/2, respectively) is much higher than
The valence-band spectrum of carbon nitride material as
measured by XPS also can distinguish the effect of nitrogen
incorporation in the films. The valence-band spectrum is usu-
ally recorded using UV photoelectron spectroscopy (UPS).
So far, very few results on the valence-band structure of car-
bon nitride films have been reported [25], although the corres-
ponding studies on diamond, graphite, and amorphous carbon
have been extensively conducted [26]. The fingerprint cap-
acity for structural information of valence-band spectra due
to s and p characters in the bonds of carbon nitride materi-
als can be very valuable, since this information is sometimes
unobtainable from core-level photoelectron spectra [27]. Al-
though the valence-band density of states itself is a complex
and important research topic, especially for the carbon ni-
tride materials, we will discuss only its ability to predict the
structural information. It is of great interest to compare the
valence bands of the films with different nitrogen content.
Figure 5 shows the XPS valence-band spectra of the carbon
nitride films as a function of nitrogen content. The corres-
ponding spectrum of the pure carbon film is also shown for
comparison. Four distinct regions are found in the valence-
band spectra: region I at 2 ∼ 7 eV, region II at 7.5 ∼ 12 eV,
region III at 12.5 ∼ 20 eV, and region IV at 20 ∼ 30 eV. The
assignment of these regions to definite band structures is quite
complicated [13], because the intensity of valence-band spec-
tra not only depends on the density of states, but also on the
photoemission cross section, where the latter is strongly de-
pendent on the excitation energy [28], for example, UV or
soft X-ray. Here, based on the reference spectra of various
forms of carbon measured by McFreely et al. using XPS [29]
and by Wesner et al. using UPS [30], we could assert that
region I at 2 ∼ 7 eV is attributable to the 2p bands, region
II at 7.5 ∼ 12 eV is a mixture of 2s and 2p states, and re-
gions III and IV both arise from 2s-like bands. For the pure
carbon film shown in Fig. 5, the predominant valence-band
that of C 2s and C 2p (0.047, 0.0006, and 0.0012 for 2s1/2
,
2p1/2, and 2p3/2, respectively) when using Mg Kα excita-
tion, the intensity of the valence-band spectrum changes with
the nitrogen incorporation. Due to the fact that the pho-
toemission cross section of the s band is 13 times higher
than the p band for XPS valence-band spectra, the region
IV has the most obvious change compared to other regions.
To our knowledge, we have not found any similar reported
results indicating the obvious change in valence-band struc-
ture of carbon nitride induced by the presence of nitrogen.
The reason could be attributed to the very low nitrogen con-
tent in many reported films; therefore, the bonding struc-
tures are eventually controlled by C-C phase rather than C-N
structure.
It is known that the valence bands of oxygen and fluo-
rine are also positioned in the binding-energy region of the
valence bands of carbon and nitrogen. However, the fluorine
should not contribute the valence-band spectra of the films ac-
cording to the results shown in Fig. 2. As for the oxygen, no
spectra in Fig. 5 showed the band around 7.0 eV for O 2p.
The binding energy of O 2s is also known to be almost 3.6 eV
and 4.9 eV higher than that of N 2s and C 2s, respectively.
Therefore, considering the low content of oxygen on the sur-
face, the oxygen was not expected to significantly influence
the valence-band structure of the films.
In summary, in order to understand the role of nitrogen
in controlling the electronic structure of carbon nitride films,
some fingerprint information was found by systematically in-
vestigating the core-level and valence-band spectra of the
carbon nitride films with high nitrogen content prepared by
reactive pulsed-laser deposition. Due to the fact that this in-
formation was obtained from the almost pure carbon nitride
films, it will be useful and reliable for correctly characterizing
carbon nitride materials.
Fig. 5. XPS valence-band spectra of the carbon nitride films deposited at
different nitrogen partial pressures