Journal of the American Ceramic Society p. 607 - 614 (1990)
Update date:2022-08-11
Topics:
Cagliostro
Riccitiello
Carswell
A study of the products and reactions occurring during the chemical vapor deposition of silicon carbide from dimethyldichlorosilane in argon is presented. The silicon carbide solid that formed showed the presence of hydrogen and chlorine as impurities, wh
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