Analysis of the pyrolysis products of dimethyldichlorosilane in the chemical vapor deposition of silicon carbide in argon

Article abstract of DOI:10.1111/j.1151-2916.1990.tb06560.x

A study of the products and reactions occurring during the chemical vapor deposition of silicon carbide from dimethyldichlorosilane in argon is presented. The silicon carbide solid that formed showed the presence of hydrogen and chlorine as impurities, wh