
Journal of Materials Science p. 5528 - 5533 (1993)
Update date:2022-08-17
Topics:
Rozenberg
Sinenko
Chukanov
The kinetics and structure of chemical vapour-phase deposition of boron nitride ceramics on a graphite matrix from the mixture BCl3 /NH3/N2 have been investigated for a wide range of conditions (temperature 1300-2100 °C, pressure 130-2600 Pa, at varying partial pressures of the components). The growth-rate was found to vary non-linearly with the consumption rates of the reagents. The content of hexagonal components in the BN-ceramics rose, while the turbostrate microphase content diminished with temperature. The dependence of the concentrations of hexagonal, turbostratic and amorphous fractions in BN-ceramics on the reaction mixture composition and total pressure have been determined.
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