Journal of the Electrochemical Society p. 2346 - 2351 (1995)
Update date:2022-08-28
Topics:
Inokuma
He
Kurata
Hasegawa
Electron spin resonance (ESR) spectra in plasma-deposited amorphous SiOx films are investigated as a function of oxygen content, x. For x<1.5, a broad resonance line around g = 2.005 dominates the ESR spectra. On the other hand, for x>1.5, seve
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