2
54
Journal of the American Ceramic Society—Chuang et al.
Vol. 94, No. 1
14
Y. Gao, Y. Masuda, T. Yonezawa, and K. Koumoto, ‘‘Site-Selective Depo-
oxidizing the deposited Ni/Ti films formed by the physical vapor
deposition method.
24
sition and Micropatterning of SrTiO
3
Thin Film on Self-Assembled Monolayers
by the Liquid Phase Deposition Method,’’ Chem. Mater., 14 [12] 5006–14 (2002).
Y. Gan, Q. J. Cai, C. M. Li, H. B. Yang, Z. S. Lu, C. Gong, and M. B. Chan-
15
Park, ‘‘Solution-Prepared Hybrid-Nanoparticle Dielectrics for High-Performance
Low-Voltage Organic Thin-Film Transistors,’’ ACS Appl. Mater. Interfaces, 1 [10]
IV. Conclusions
This study successfully produced high-quality nickel titanate
thin films at low temperatures. NiTiO thin films were deposited
on SiO /Si(100) by the spin coating sol–gel method using tita-
nium isopropoxide, nickel acetate tetrahydrate, and 2-methoxy-
ethanol. The single-phase NiTiO was observable by XRD when
the films were annealed at and above 6001C. The film mo-
rphologies were smooth as confirmed by SEM. The XPS and
Raman analysis also indicated the films were of NiTiO when
3
2
230–6 (2009).
16
X. Du, Y. Xu, H. Ma, J. Wang, and X. Li, ‘‘Low-Temperature Synthesis of
Bismuth Titanate by an Aqueous Sol–Gel Method,’’ J. Am. Ceram. Soc., 91 [7]
079–82 (2008).
3
2
2
17
P. R. Evans, X. H. Zhu, P. Baxter, M. McMillen, J. McPhillips, F. D. Mor-
rison, J. F. Scott, R. J. Pollard, R. M. Bowman, and J. M. Gregg, ‘‘Toward Self-
Assembled Ferroelectric Random Access Memories: Hard-Wired Switching
Capacitor Arrays with Almost Tb/in. Densities,’’ Nano Lett., 7 [5] 1134–7 (2007).
3
2
18
D.-Y. Wang, C.-H. Chien, C.-Y. Chang, C.-C. Leu, J.-Y. Yang, S.-H.
Chuang, and T.-Y. Huang, ‘‘Low-Pressure Crystallization of Sol–Gel-Derived
PbZr0.52Ti0.48O3 Thin Films at Low Temperature for Low-Voltage Operation,’’
Jpn. J. Appl. Phys., 42 [5A] 2756–8 (2003).
annealed at and above 6001C. In summary, we were able to
19
produce the single-phase NiTiO
3
films at the lowest processing
temperature currently known. Future applications of this high-k
E. M. Alkoy, C. Dagdeviren, and M. Papila, ‘‘Processing Conditions and Ag-
ing Effect on the Morphology of PZT Electrospun Nanofibers, and Dielectric
Properties of the Resulting 3–3 PZT/Polymer Composite,’’ J. Am. Ceram. Soc., 92
[11] 2566–70 (2009).
film in the semiconductor industry are promising.
20
Y.-J. Lin, Y.-H. Chang, W.-D. Yang, and B.-S. Tsai, ‘‘Synthesis and Char-
acterization of Ilmenite NiTiO and CoTiO Prepared by a Modified Pechini
Method,’’ J. Non-Cryst. Solids, 352, 789–94 (2006).
3
3
References
21
A. E. Henkes, J. C. Bauer, A. K. Sra, R. D. Johnson, R. E. Cable, and R. E.
Schaak, ‘‘Low-Temperature Nanoparticle-Directed Solid-State Synthesis of Ternary
1
Z. Tang, Z. Zhou, and Z. Zhang, ‘‘Experimental Study on the Mechanism of
BaTiO -Based PTC–CO Gas Sensor,’’ Sens. Actuat. B, 93, 391–5 (2003).
3
and Quaternary Transition Metal Oxides,’’ Chem. Mater., 18 [2] 567–71 (2006).
M. S. Sadjadi, K. Zare, S. Khanahmadzadeh, and M. Enhessari, ‘‘Structural
2
22
M. Siemons and U. Simon, ‘‘Gas Sensing Properties of Volume-Doped CoTiO
Synthesized via Polyol Method,’’ Sens. Actuat. B, 126, 595–603 (2007).
Q. Zhu, W. Y. Shih, and W. H. Shih, ‘‘Real-Time, Label-Free, All-Electrical
Detection of Salmonella Typhimurium Using Lead Titanate Zirconate/Gold-
coated Glass Cantilevers at Any Relative Humidity,’’ Sens. Actuat. B, 125, 379–
3
Characterization of NiTiO Nanopowders Prepared by Stearic Acid Gel Method,’’
3
3
Mater. Lett., 62, 3679–81 (2008).
˜
K. P. Lopes, L. S. Cavalcante, A. Z. Simoes, J. A. Varela, E. Longo, and E. R.
23
Leite, ‘‘NiTiO Powders Obtained by Polymeric Precursor Method: Synthesis and
3
8
8 (2007).
S. H. Xiao, H. J. Xu, J. Hu, W. F. Jiang, and X. J. Li, ‘‘Structure and Humidity
Characterization,’’ J. Alloys Compd., 468, 327–32 (2009).
T. M. Pan, T. F. Lei, and T. S. Chao, ‘‘Comparison of Ultrathin CoTiO and
4
24
3
Sensing Properties of Barium Strontium Titanate/Silicon Nanoporous Pillar Array
Composite Films,’’ Thin Solid Films, 517, 929–32 (2008).
R. A. Potyrailo and V. M. Mirsky, ‘‘Combinatorial and High-Throughput
Development of Sensing Materials: The First 10 Years,’’ Chem. Rev., 108 [2] 770–
NiTiO High-k Gate Dielectrics,’’ J. Appl. Phys., 89 [6] 3447–52 (2001).
3
25
A. R. Phani and S. Santucci, ‘‘Structural Characterization of Nickel Titanium
Oxide Synthesized by Sol–Gel Spin Coating Technique,’’ Thin Solid Films, 396,
1–4 (2001).
5
26
8
13 (2008).
G. Radno
Y. Ohya, T. Niwa, T. Ban, and Y. Takahashi, ‘‘Rectifying Properties of Oxide
6
´
K. Ouchi, ‘‘Growth Structure of Thin Films for Perpendicular Magnetic Record-
czi, P. B. Barna, M. Adamik, Z. Cziga
´
ny, J. Ariake, N. Honda, and
Semiconductor Heterostack Films at Elevated Temperatures,’’ J. Sol–Gel Sci.
Technol., 33, 323–6 (2005).
B. L. Cushing, V. L. Kolesnichenko, and C. J. O’Connor, ‘‘Recent Advances
27
ing Media,’’ Cryst. Res. Technol., 35 [6–7] 707–11 (2000).
K. Tohji, Y. Udagawa, S. Tanabe, T. Ida, and A. Ueno, ‘‘Catalyst Preparation
7
in the Liquid-Phase Syntheses of Inorganic Nanoparticles,’’ Chem. Rev., 104 [9]
3893–946 (2004).
Procedure Probed by EXAFS Spectroscopy. 2. Cobalt on Titania,’’ J. Am. Chem.
Soc., 106 [18] 5172–8 (1984).
L. Chen, S. Zhang, L. Wang, D. Xue, and S. Yin, ‘‘Preparation and Photo-
28
B. D. Cullity and S. R. Stock, Elements of X-Ray Diffraction. Prentice-Hall
Inc., New Jersey, 2001 170pp.
J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-
8
29
catalytic Properties of Strontium Titanate Powders via Sol–Gel Process,’’ J. Cryst.
Growth, 311, 746–8 (2009).
Y. Ni, X. Wang, and J. Hong, ‘‘Nickel Titanate Microtubes Constructed by
Ray Photoelectron Spectroscopy, pp. 18–20. Perkin-Elmer Corp., Minnesota, 1992.
H.-T. Chiu, C.-N. Wang, and S.-H. Chuang, ‘‘Metal-Organic CVD of Tan-
9
30
Nearly Spherical Nanoparticles: Preparation, Characterization and Properties,’’
Mater. Res. Bull., 44, 1797–801 (2009).
talum Oxide from Tert-Butylimidotris(diethylamido)tantalum and Oxygen,’’
Chem. Vap. Deposition., 6 [5] 223–5 (2000).
10
31
M. Zheng, X. Xing, J. Deng, L. Li, J. Zhao, L. Qiao, and C. Fang, ‘‘Synthesis
by Modified Sol–Gel Route,’’ J. Alloys
S. Zhang, J. Wang, and X. Wang, ‘‘Effect of Calcination Temperature on
Structure and Performance of Ni/TiO –SiO Catalyst for CO2 Reforming of
and Characterization of (Zn,Mn)TiO
3
2
2
Compd., 456, 353–7 (2008).
B. Cheng, M. Cao, P. V. Voorde, W. Greene, H. Stork, Z. Yu, and J. C. S.
Methane,’’ J. Nat. Gas Chem., 17 [2] 179–83 (2008).
G.-W. Zhou, D. K. Lee, Y. H. Kim, C. W. Kim, and Y. S. Kang, ‘‘Preparation
11
32
Woo, ‘‘Design Considerations of High-k Gate Dielectrics for Sub-0.1-mm MOS-
FET’s,’’ IEEE Trans. Electron Devices, 46 [1] 261–2 (1999).
T. M. Pan, T. F. Lei, and T. S. Chao, ‘‘High-k Cobalt–Titanium Oxide Di-
and Spectroscopic Characterization of Ilmenite-Type CoTiO3 Nanoparticles,’’
Bull. Korean Chem. Soc., 27 [3] 368–72 (2006).
M. I. Baraton, G. Busca, M. C. Prieto, G. Ricchiardi, and V. S. Escribano,
‘‘On the Vibrational Spectra and Structure of FeCrO3 and of the Ilmenite-Type
12
33
electrics Formed by Oxidation of Sputtered Co/Ti or Ti/Co Films,’’ Appl. Phys.
Lett., 78 [10] 1439–41 (2001).
Compounds CoTiO and NiTiO ,’’ J. Solid State Chem., 112, 9–14 (1994).
3
3
13
34
J. Luo, X. Xing, R. Yu, Q. Xing, G. Liu, D. Zhang, and X. Chen, ‘‘Low-
Temperature Synthesis and Characterization of (Zn,Ni)TiO Ceramics by a Mod-
J. H. Chen, T. B. Huang, X. Wu, D. Landheer, T. F. Lei, and T. S. Chao,
‘Performance Improvement of CoTiO High-k Dielectrics with Nitrogen Incor-
poration,’’ J. Electrochem. Soc., 154 [1] G18–23 (2007).
‘
3
3
ified Sol–Gel Route,’’ J. Alloys Compd., 420, 317–21 (2006).
&