Dissociative electron capture of diazoquinones: Matrix isolation ESR study

Article abstract of DOI:10.1021/ja00066a008

It is postulated that the electron beam of the AZ-type resist (those containing diazoquinones as the labile component) is initiated by dissociative electron capture producing a phenoxy radical anion and N₂. Na atoms and model diazoquinone molecules, 1-oxo-2-diazonaphthoquinone, 2-oxo-1-diazonapithoquinone, and o-diazobenzoquinone, were cocondensed in argon matrices, and the Na-to-diazoquinone electron transfer was induced by mild radiation (λ > 580 nm). ESR examination of the matrices that the three diazoquinones all readily captured low-energy electrons and dissociated to yield the respective phenoxy anion radicals resulting from N₂ cleavage as postulated.