A nickel(II) guanidinate compound and its potential as CVD precursor for nickel related films

Article abstract of DOI:10.1016/j.poly.2018.09.043

In this study, a nickel(II) compound with guanidinate ligand of the general form [((Me)₂NC(ⁱPrN)₂)₂Ni] has been synthesized and isolated from the reaction of NiCl₂ with the corresponding lithium salt of guanidinate ligand [(Me)₂NC(ⁱPrN)₂Li] at 70 °C. Its structure was determined by ¹H NMR, elemental analysis, and single crystal X-ray diffraction. Thermogravimetric analysis (TGA) was employed to study the thermal properties (including thermal stability, volatility, vapor pressure and transport behavior) of compound. Furthermore, a deposition experiment was made to examine the compound's potential as CVD precursor, and a Ni metal film was successfully deposited. These preliminary results illustrate the potential of this compound to act as CVD precursor.