Full text of DOI:10.1063/1.107304

Laserassisted organometallic chemical vapor deposition of films of rhodium and
iridium
Judson S. Cohan, Haojie Yuan, R. Stanley Williams, and Jeffrey I. Zink
Citation: Applied Physics Letters 60, 1402 (1992); doi: 10.1063/1.107304
View online: http://dx.doi.org/10.1063/1.107304
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/60/11?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
128.248.155.225 On: Tue, 25 Nov 2014 00:20:54

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
128.248.155.225 On: Tue, 25 Nov 2014 00:20:54