N. Al-Rubaiey
JournalofPhotochemistry&PhotobiologyA:Chemistry360(2018)145–151
6.5 cm and internal diameter 2.8 cm to be used at high temperature.
The two other cells were built from Pyrex glass with silica windows
fixed by using black wax. These cells were suitable for possible cleaning
of the windows. These windows easily became covered with thin solid
films after a number of experiments. One cell was constructed of
spectrosil quartz tubing and wrapped (except for the window) in
“electro-thermal” heating tape and maintained at 343 K during the time
of experiments.
The furnace consisted of a horizontal silica tube (4 cm in diameter),
wound with nichrome resistance wire as a heater and contained in a
box packed with asbestos fiber. The furnace electrical supply was
controlled by using a Variac. Temperatures were measured using a
chrome-alumel thermocouple, located near the center of the furnace.
The photolysis light was provided by an Oxford KX2 pulsed laser
operated with rare-gas halide (known as an excimer laser) as the gain
medium to provide ultraviolet (UV) radiation. It was usually used with
Ar/F2 mixtures to provide a wavelength of 193 nm. Discharge effi-
ciencies were around 1–5% and emitted pulses have 0.1 to 1 J of energy
in the time range of 10–100 ns. Average powers are normally in the 10
to 100 MW range.
authentic sample. As will be seen, this photolysis provides a relatively
clean source of methylsilylene (MeSiH). MeSiH reacts with the pre-
cursor, DMDS to produce TMTS:
MeH2SiSiH2Me (DMDS) + hѵ → MeSiH + MeSiH3
MeSiH + DMDS → MeSiH2SiMeHSiMeH2 (TMTS)
To start with, the measurement of TMTS was
a problem.
Chromatographic peaks were irreproducible and had rather small yields
which made them difficult to analyze. However there were several
unrecorded, small peaks in the region where these molecules could be
expected. After heating the sample loop of the gas chromatograph the
peaks become reproducible. Because of the absence of TMTS authentic
sample, TMTS was identified by comparing its retention time with those
of other available trimethyltrisilane samples (ie. H3SiSiH2MeSiH2Me
and HSiMe2SiMeHSiH2Me) [9,10]. Its identity was supported by other
experiments [11]. The area for this peak was found to increase with the
number of shots and decrease in the presence of another substrate
under fixed photolysis conditions. TMTS was also observed as one of the
main products in the pyrolysis of DMDS by Ring et al. [10]. In the Ring
et al. work, the reaction was studied over the temperature range
295–573 K.
2.2. Source and purity of materials
Small traces of other compounds such as SiH4 and Me2SiH2 (in
addition to MeSiH3 and TMTS) have also been observed. The most
obvious suggestion for the formation of those compounds was due to
the presence of about 4% of the 1,1-dimethyldisilane impurity in
DMDS. This impurity was identified by comparing its retention time
with that of an authentic sample but under different GC conditions
[11]. At 193 nm the photodecomposition of this impurity may lead to
the formation of SiH4 and Me2SiH2 as follows:
1,2-Dimethyldisilane, DMDS, was kindly obtained from Professor E.
Hengge (University of Graz/Austria), and found to be about 85% pure.
The purity was improved to better than 95%, by low temperature dis-
tillation using a dry-ice slush technique (DMDS has a vapor pressure of
0.3 mm at 195 K). Unfortunately amongst the remaining traces of other
compounds (MeSiH3, Me2SiH2, Me3SiH, SiH4, Me2SiHSiH3 and
MeSiH2SiHMeSiH2Me) were two of the main products viz, methylsilane
and 1,2,3-trimethyltrisilane. This means that correction had to be ap-
plied to the yields of these compounds in the photolysis runs.
Other compounds, such as SiH4 (> 99.9 purity, BOC Ltd. Electra-II
grade), MeSiH3 (99.6% purity, prepared in our lab.), Me2SiH2 (99.5%
purity, prepared in our lab.), and Me3SiH (99.8% purity, Fluorochem
Ltd.) were degassed by freezing down (77 K) in liquid nitrogen and
were used in this work. Electra-II grade Nitrogen (oxygen free, 99.9%
purity) was supplied by BOC Ltd.
Me2SiHSiH3 → Me2SiH2 + SiH2
Me2SiHSiH3 → SiH4 + SiMe2
Me2SiH2 and SiH4 were identified by comparison of their retention
times with those of authentic samples. Me2SiH2 was also detected by
gas chromatography in the work of Davidson et al. [9] on the pyrolysis
of DMDS. SiH2 and SiMe2 probably react with DMDS to give other
products (H3SiSiH2MeSiH2Me and HSiMe2SiMeHSiH2Me) but these will
have rather small yields which makes them difficult to analyze. How-
ever there were several unrecorded, small peaks in the region where
these molecules could be expected.
2.3. Experimental procedure
Samples for photolysis were prepared by putting the required
pressure of precursor into the reaction cell then adding the other re-
acting substrate (if required) and finally making the reaction mixture
up with nitrogen to the required pressure. Every precaution was made
to reduce the adsorption of the silicon compounds on the walls of the
gas line, the reaction cell and the gas sampling loop of the GC by
heating. After the photolysis, the mixture of gases in the cell was ana-
lyzed by gas chromatography. Kinetic experiments were carried out
with mixtures containing 50–100 mTorr precursor with partial pres-
sures of the reacting substrate in the range of 50–2000 mTorr and total
pressure ca, 200 Torr (made with nitrogen). An average of 2–10 laser
shots was used which was indicated by the amount of the product peaks
by GC. The number of shots was chosen as small as possible to keep the
conversion low. The procedure for a particular substrate gas was to vary
the ratio of precursor to the gas added and monitor the change in the
ratio of products produced by gas chromatography.
Preliminary experiments indicated the formation of an opaque solid
film which covered the walls of the cell, particularly when high laser
pulse energies were employed. The production of such films reduced
the transmission of laser radiation and also could lead to product
coming from direct photolysis of the adsorbed material. Usually those
compounds if produced were in small yields compared to those pro-
duced by the homogenous photolysis of DMDS in the gas phase. Many
efforts were made to reduce the effect of this film by using a low
pressure of DMDS and low conversion (a few numbers of shots). Regular
cleaning of the cell after five runs and leaving it overnight in an oven to
830 K prevented film build up.
DMDS photochemistry was explored by investigating the experi-
mental effects of the number of laser shots, DMDS pressure, total
pressure, added oxygen and temperature. In order to assess the effects,
The GC peaks ratio [MeSiH3]/[DMDS] was measured. This ratio gives
an indication of the photochemical conversion. TMTS was not identified
(and therefore not monitored) at the beginning of the work. The results
of these preliminary investigations are shown in Figs. 1–5. A number of
points can be extracted from this study:
3. Discussion
3.1. Results and discussion
1) The results in Fig. 1 show the linear dependence of the ratio with
the number of shots. This suggests a well behaved reaction with product
yields proportional to absorbed photons.
2) Fig. 2 demonstrates that the more DMDS in the cell, the less is the
[MeSiH3]/[DMDS] ratio. A possible explanation is that most of the
3.1.1. Experiments with DMDS alone
The first set of experiments indicated that the major products were
methylsilane (MS) and 1,2,3-trimethyltrisilane (TMTS). The MS peak
was identified by comparison of its retention time with that of an
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