Internal stress in Ni, NiFe, CoFe, and CoNi layers measured by the bent strip method

Article abstract of DOI:10.1149/1.2086266

The physical meaning and formulas for the calculation of the different, but interrelated, types of the internal stress (IS) in thin films (instantaneous, residual, and average) are reviewed. These formulas are then applied to the cases of plated Ni and Ni

Full text of DOI:10.1149/1.2086266

Downloaded on 2015-04-13 to IP 128.210.126.199 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-04-13 to IP 128.210.126.199 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-04-13 to IP 128.210.126.199 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-04-13 to IP 128.210.126.199 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-04-13 to IP 128.210.126.199 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-04-13 to IP 128.210.126.199 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-04-13 to IP 128.210.126.199 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-04-13 to IP 128.210.126.199 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).