Preparation and characterization of Pd and Pd-Ni alloy membranes on porous substrates by mocvd with mixed metal β-diketone precursors

Article abstract of DOI:10.1016/S0025-5408(97)00005-6

A novel metal-organic chemical vapor deposition(MOCVD) process with a mixed metal β-diketone precursor to successfully prepare Pd and Pd-Ni alloy composite membranes is described. A palladium phase deposit consisting of agglomerates of tiny crystallites with a dimension of around 30 × 10 nm was formed on porous Al₂O₃ substrates, when using a single Pd(AcAc)₂ precursor. With a mixed precursor of Pd(AcAc)₂ + Ni(AcAc)₂, uniform and dense Pd-Ni alloy membranes (consisting of primary crystallites with a dimension of 40 × 15 nm) were reproducibly obtained on porous alumina supports. N₂ permeation tests indicated that the Pd-Ni alloy layer was gastight and crack-free. XPS studies revealed that no oxygen nor carbon impurities were incorporated into the bulk membranes. The Pd/Ni ratio on the surface of Pd-Ni alloy layer was very close to that of the mixed precursor, but much less Ni content (<1/150) was detected in the deposit body. Copyright