(1989)
Update date:2022-08-16
Topics:
Ishizaki, K.
Egashira, T.
Tanaka, K.
Celis, P. B.
A direct method of producing ultra-fine nitride and carbide powders of 20 to 40 nm by arc plasma in a controlled atmosphere (with ammonia or methane gas) is described. The powders produced were SiC, TiC, WC (+ W2C), AIN and Si3N
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