Full text of DOI:10.1063/1.96168

Properties of carbon films by dc plasma deposition
Kazutaka Fujii, Nobuaki Shohata, Masao Mikami, and Masatomo Yonezawa
Citation: Applied Physics Letters 47, 370 (1985); doi: 10.1063/1.96168
View online: http://dx.doi.org/10.1063/1.96168
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/47/4?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.88.90.110 On: Sat, 20 Dec 2014 17:01:00
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.88.90.110 On: Sat, 20 Dec 2014 17:01:00
1

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.88.90.110 On: Sat, 20 Dec 2014 17:01:00
1