Internal stress in growing ZrO2 films

Article abstract of DOI:10.1016/0022-5088(91)90299-J

The anodic and open-circuit stresses were studied during the potentiostatic anodic oxidation of zirconium. The anodic stress, i.e., the superposition of growth and electrostrictive stresses, was compressive whereas the open-circuit stress was tensile in the growing zirconium oxide. For a constant value of anodization time, the anodic stress decreased and the open-circuit stress increased with increasing thickness of the growing zirconium oxide.