ARTICLE IN PRESS
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V. Cloet et al. / Journal of Solid State Chemistry 182 (2009) 37–42
2. Method
epitaxial growth of the films were investigated using standard
X-ray diffraction. For acquiring –2 -scans, a Siemens (D5000)
was used. Pole figures, -scans and -scans were collected with a
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2.1. Precursor solution
Bruker, AXS Discover. These measurements allow the determina-
tion of the full-width at half-maximum (FWHM) of the out-of-
plane and the in-plane distribution of the oxide layer. Further
analysis of the surface crystallinity was carried out by reflection
high energy electron diffraction (RHEED, Staib Instruments). This
technique allows analysis of the top 5 nm of the surface. An
The LZO solution was prepared by dissolving 1.6 g lanthanum
(III) acetate hydrate (La(CH3COO)3.1H2O, 99.9% Aldrich) in a
mixture of 18 mL distilled water and 6.3 mL glacial acetic acid
(CH3COOH, 99.8%, Aldrich) at 90 1C. An equimolar quantity of
zirconium (IV) hydroxide acetate hydrate (Zr(OH)3(CH3COO).H2O,
Aldrich) was added to this mixture, after all lanthanum acetate
was dissolved. Upon cooling the solution to room temperature,
triethanolamine (N(CH2CH2OH)3, 99+%, Acros) was added. Finally,
the aciditiy of the solution was decreased up to a value of 7 by
adding ammonium hydroxide (25wt%, Chemlab). This procedure
has been previously described in detail for the production of thin
YBa2Cu3O7-layers [9].
electron energy beam of 30 keV and a beam current of 50 mA was
applied under a grazing incident angle (0.5–1.51) to the sample.
The diffraction pattern was recorded using a CCD camera and
analysed with a computer program based on the kinematic theory
of electron scattering. The surface microstructure was analysed
with FEG–SEM (LEO 1530 Gemini ) and its roughness by atomic
force microscopy (AFM, molecular imaging, PicoPlus) in AC
tapping mode. For transmission electron microscopic (TEM)
analysis, a JEM 2200FS (JEOL) was used to obtain the images.
Copper grids with mesh 2000 were immersed in the precursor
solution and subsequently heated to the desired temperature
under forming gas atmosphere.
2.2. Substrate and coating
The Ni-5 at%W tape (evico GmbH, Germany) (80 mm thick) was
cut into strips of approximately 2.5 cm length. Prior to dip-
coating, the substrates needed cleaning to enhance wettability. In
a first step these substrates were thermally cleaned at 800 1C
(60 min) under Ar-5% H2 atmosphere. After this, the substrates
were chemically cleaned in different solvents. This cleaning
procedure is described elsewhere in more detail [10]. The
substrates were preserved in methanol to prevent degradation
of the wettability and were used as soon as possible.
3. Results and discussion
3.1. TGA–DTA
In order to obtain information about the decomposition
behaviour of the gels and to adjust the thermal treatment
accordingly, a TGA–DTA analysis of the gels was carried out. In
Fig. 1 the TGA–DTA spectrum until 1000 1C is shown with an insert
of a HR-TGA until 500 1C. At temperatures below 200 1C, two large
decomposition steps occur in rapid succession. These two steps
can be associated with the release of water, ammonia and acetic
acid. These products are the main constituents of the gel and are
most likely to evaporate quickly since their boiling point is lower
than 200 1C. Soon after, at temperatures ranging from 200–500 1C,
gases such as CO and CO2 escape from the layer [12,13]. As can be
seen from the thermogravimetric plot, there is no weight loss
above 4501C, only a small exothermic peak can be seen in the DTA
curve at 7801C. This corresponds most likely to the formation of
LZO oxide out of La2O3 and ZrO2. These findings are also confirmed
by the TGA–DTA plots of lanthanum acetate and zirconium
hydroxy acetate, in which it is clear that La2O3 and ZrO2 are being
formed at approximately 7501C (not displayed here).
The substrates were dip-coated in a cupboard with a laminar
flow classified as Class 10 according to the Federal Standard 209
and mounted in a Class 1000 clean room. The results presented
here, were obtained after exploration of several variables such as
dip-coat velocity, number of dip-coated layers, presence of seed
layers. One could conclude that higher dip-coating velocities lead
to thicker but less textured layers. In this research, in contrast to
previous research [11], the presence of seed layers, did not
improve the results. Therefore, the results of only one single layer,
are discussed in this paper. A solution with a total metal
concentration of 0.4 M was used for dip-coating. Dip-coating
was carried out at room temperature with a dip-coat velocity of
20 mm/min and the substrates were withdrawn from the solution
under an angle of 901. The substrates were immersed in the
solution for about 30 s before they were withdrawn. After
deposition of the thin film, the substrate was dried in horizontal
position at 60 1C for about 30 min. The colour change from opaque
to yellow during gelation can be attributed to a colour change of
the triethanolamine upon heating. A thermal treatment at high
temperatures was needed to convert the amorphous gel to a
crystalline textured film. The thin film was heated to 900 1C with a
heating rate of 5 1C/min. After 50 min dwell time, the temperature
was rapidly increased to 1050 1C and maintained constant for
50 min. This thermal treatment was carried out entirely under
forming gas (Ar-5%H2) atmosphere. The gas flow was kept
constant at a value of 0.4 L/min. The sample was cooled to room
temperature at a rate of 10 1C/min and under continuous flowing
of forming gas.
3.2. TEM
The transition from gel state to crystalline material is analysed
by high resolution TEM of LZO powder. In Fig. 2, an overview of
TEM micrographs of the gels at different temperatures is
displayed. The dip-coated copper grids were heated to tempera-
tures at which a weight loss was observed in the high resolution
TGA. In this way, we can follow the behaviour of the gel and the
transition into crystalline powder. Gels produced at low tempera-
tures (60 1C) are unstable and quickly damaged by the electron
beam, as the illuminated gel tends to blow up and burst open.
Discrete particles are absent in the early gel stages until 305 1C. At
360 1C, small particles (10–50 nm) can be distinguished in the gel.
At higher temperatures, larger particles form agglomerates. The
particles formed at 820 1C are crystalline and have an average size
of 30 nm. These findings are in good agreement with the
conclusions drawn from the TG–DT analysis. Elemental analysis
with electron energy-loss spectroscopy (EELS) will allow us to
investigate the nature of the particles in the gels at 360 1C.
2.3. Characterisation
The decomposition behaviour of the LZO gel was investigated
by high resolution thermogravimetric analysis (TGA, TA-Instru-
ments, Q500). An air flow on the sample of 60 mL/min was used.
The maximal heating rate was 20 1C/min. Differential thermal
analysis (DTA) was coupled to TGA to obtain information on
physical changes that do not involve mass loss. Crystallinity and