J. Am. Ceram. Soc., 91 [11] 3738–3741 (2008)
DOI: 10.1111/j.1551-2916.2008.02672.x
r 2008 The American Ceramic Society
ournal
J
Low-Temperature Sintering and Microwave Dielectric Properties of
Ba (VO ) –BaWO Ceramic Composites
3
4 2
4
w
Hao Zhuang, Zhenxing Yue, Siqin Meng, Fei Zhao, and Longtu Li
State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering,
Tsinghua University, Beijing 100084, China
3
–7
New low-temperature co-fired microwave dielectric composites
with compositions of (1–x)Ba (VO ) –xBaWO (x 5 0–1) were
been studied as glass-free LTCCs.
Bi O - or TeO -rich
2 3 2
compounds show relatively low sintering temperatures;
however, they have poor chemical compatibility with silver
electrodes, which limits their use in multilayer devices.
Tungsten- and vanadium-rich compounds have both low
sintering temperatures and excellent dielectric properties at
3
4 2
4
prepared by firing mixtures of Ba (VO ) and BaWO . Thermal
3
4 2
4
3
–6
mechanical analysis indicated the ceramic composites had
relatively low densification temperatures and could be sintered
in the temperature range 9251B9501C. X-ray diffraction
patterns showed that Ba (VO ) and BaWO coexisted and
8
,9
microwave frequency. Among them, BaWO
4
, which can be
3
4 2
4
no secondary phase was detected in the sintered bodies, implying
good chemical compatibility between the two phases. Near-zero
sintered at 11001C, was reported to have microwave dielectric
9
properties of e
Ba (VO has microwave dielectric properties of e
B40 000 GHz, and t
limited their applications in microwave devices. It is noted that
Ba (VO has a large positive t value (B160 ppm/1C), and
BaWO has a large negative t
r
B8, Q ꢁ fB57500 GHz, and t
f
Bꢀ78 ppm/1C.
B11, Q ꢁ f
B160 ppm/1C. However, large t values
temperature coefficients of the resonant frequency (s ) could be
3
)
4 2
r
f
8
achieved by changing the relative content of the two phases, due
to their positive and negative s values, respectively. With
f
f
f
increasing BaWO (x from 0.50 to 0.65), the s value of the
3
)
4 2
f
4
f
composites decreased from 110.9 to ꢀ1.9 ppm/1C, and the
quality factor (Q ꢁ f value) increased from 66700 to 79 100
GHz. The best microwave dielectric properties were obtained for
x 5 0.65 samples sintered at 9251C with a dielectric constant of
4
f
value (Bꢀ78 ppm/1C). One can
expect that a dielectric material with near-zero t value and
f
high Q ꢁ f value might be obtained by combining Ba (VO )
3
4 2
4 3 4 2 4
with BaWO . In the present work, (1–x)Ba (VO ) –xBaWO
1
1.1, a Q ꢁ f value of 79100 GHz, and a s value of ꢀ1.9 ppm/
(x 5 0–1) ceramic composites were prepared and their
microstructure and microwave dielectric properties were
investigated systematically.
f
C. Chemical compatibility experiments showed the ceramics
1
are compatible with silver during cofiring process.
I. Introduction
II. Experimental Procedure
ECENTLY, extensive attention has been paid to multilayer
microwave devices because of the rapid progress of mobile
The starting materials used were high-purity (499.9%) powders
of BaCO , V O , and WO . Ba (VO ) and BaWO powders
3 2 5 3 3 4 2 4
with stoichiometric compositions were synthesized using a
conventional mixed oxide route by calcining at 8001C for 4 h
R
1
communication systems. The development of low-temperature
cofired ceramics (LTCC) has been stimulated by the benefits
offered for the fabrication of miniature multilayer devices in-
volving the cofiring of dielectrics and highly conductive metals,
and 7501C for 5 h, respectively. (1–x)Ba
(x 5 0–1) mixtures were then prepared by pure Ba
BaWO by weight ratio. The mixtures were ball milled in alcohol
3
(VO
4
)
2
–xBaWO
4
3
(VO and
4 2
)
2
such as silver and copper. The sintering temperatures of dielec-
4
tric ceramics must be lower than the melting point of the elec-
trode metals, for example, 9611C for silver or 10641C for copper;
furthermore, chemical compatibility between the ceramic and
metal electrodes must be satisfied. However, most of the com-
mercial microwave dielectric ceramics available exhibiting high
for 5 h using zirconia balls. The slurries were dried, mixed with
an appropriate amount of PVA (5 wt%) as a binder, and then
screened with a 60 mesh. The screened powders were pressed
into cylindrical pellets with a diameter of 10 mm and a height of
about 5 mm under a pressure of B200 MPa. These pellets were
preheated at 6001C for 4 h to expel the binder and then sintered
at temperatures from 9001 to 10001C for 4 h in air.
quality factor (Q), high dielectric constant (e
r
), and near-zero
) are sintered at
temperature coefficient of resonant frequency (t
f
high temperatures. In order to lower the sintering temperature
of dielectric ceramics, some low melting point oxides or glasses
are generally added to promote the densification process by
liquid-phase sintering. Unfortunately, the presence of a glassy
phase in the sintered ceramics increases dielectric loss and de-
creases dielectric constant, due to the high loss and low permit-
tivity behavior of the glassy phases. Therefore, exploring new
ceramics with low firing temperature has been receiving increas-
ing attention. Some low-temperature firing ceramic compounds
such as bismuth- or tellurium-containing material systems have
The crystalline phases of the sintered samples were deter-
mined by X-ray diffraction (XRD), using CuKa radiation
(Rigaku D/Max-2500, Rigaku, Tokyo, Japan). Shrinkage
curves were measured using thermal mechanical analysis
(TMA) (SETARAM TGA TMA DSC, Caluire, France) at a
heating rate of 101C/min. The microstructures of sintered ce-
ramics were observed using a scanning electron microscope
(SEM, FEI QUANTA 200F, FEI Deutschland GmbH, Kassel,
Germany). The microwave dielectric properties were measured
1
0–12
by the Hakki–Coleman method and cavity method
using an
HP8720ES network analyzer (Hewlett-Packard, Santa Rosa,
CA). The temperature coefficient of the resonant frequency
N. Alford—contributing editor
f
(t ) was obtained in the temperature range from 201 to 801C.
Manuscript No. 24726. Received May 23, 2008; approved July 23, 2008.
This work was supported by the Natural Science Foundation of China (Grant Nos.
III. Results and Discussions
50672043, 50621201, and 50632030), and the Ministry of Science and Technology of China
through 973-Project under 2002CB613307.
3 4 2 4
Figure 1 shows the XRD patterns for (1–x)Ba (VO ) –xBaWO
(x 5 0.50–0.65) ceramics sintered at 9251C for 4 h. All the main
peaks could be indexed in terms of BaWO with the scheelite
4
3
738