Bulletin of the Chemical Society of Japan p. 2363 - 2367 (1990)
Update date:2022-08-29
Topics:
Kurosaki, Akito
Okazaki, Susumu
For surface modification, the vapor-phase fluorination of SiO2-Al2O3 with CClF3 was carried out at various temperatures ranging from 350 to 550 deg C in a conventional flow recator.It was found that surface fluorination at about 400 deg C was especially e
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