Integrated microfluidic–microoptical systems fabricated by dry etching of soda-lime glass
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Add time:09/02/2019 Source:sciencedirect.com
In the paper, the method of fabrication of monolithically integrated microfluidic–microoptics systems is presented. Soda-lime glass is used as a substrate material, in which the waveguiding optics is fabricated by means of an ion exchange process, whereas the microfluidic channel is manufactured using reactive ion etching technique. Basic optical characteristics of the device are also reported.
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