European Journal of Inorganic Chemistry p. 1833 - 1839 (2011)
Update date:2022-08-03
Topics:
Yoo, Seung Ho
Choi, Hana
Kim, Hyo-Suk
Park, Bo Keun
Lee, Sun Sook
An, Ki-Seok
Lee, Young Kuk
Chung, Taek-Mo
Kim, Chang Gyoun
Novel single precursors for Ni, Ni(dmamp)2 (1), Ni(deamp) 2 (2), and Ni(emamp)2 (3), were synthesized by the metathesis reaction between [Ni(NH3)6]Cl2 and two equiv. of Na(dmamp), Na(deamp), and Na(emamp), respectively. Complexes 1-3 have been characterized by IR, 1H NMR, and 13C NMR spectroscopies, and microanalytical data, as well as single-crystal X-ray diffraction studies. Through GC/MS analysis of the gaseous species generated by the decomposition of 1, a self-reduction pathway to form metallic Ni was studied. By the metalorganic chemical vapor deposition of 1, metallic Ni hexagonal-phase thin films were obtained at 250 °C and cubic-phase thin films were obtained at 400 °C.
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