Chemical Vapour Deposition of Germanium Films by Laser-induced Photolysis of Ethylgermanes

DOI: 10.1039/ft9928801637

Source and publish data:

Journal of the Chemical Society - Faraday Transactions p. 1637 - 1642 (1992)

Update date:2022-08-11

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Authors:

Pola, Josef

Parsons, Jonathan P.

Taylor, Roger

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Article abstract of DOI:10.1039/ft9928801637

Excimer laser photolysis of ethylgermanes Et_nGeH_4-n (n = 1-4) at 193 nm yields ethane, ethene and butane along with germanium deposited on the inner surface of the reactor.The distribution of gaseous products is remarkably different

Full text of DOI:10.1039/ft9928801637

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