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approximately 330 and 140 Torr, respectively. Fig. 5c shows FE-SEM image of the NiO particles
prepared using 16 mm glass filter. Nanometer order particles can be obtained from the two types of glass
filters used. In this study, the initial droplet size as well as the size and morphology of final product had
expected to be changed by changing the filter pore size. However, from 5.5 to 16 mm pore diameter, the
nanoparticles did not show notable changes in size or morphologies. This result was confirmed by Kang
and Park [14] by changing the solvent from water to methyl alcohol. They found that there was no
significant change in the size of ZnO nanoparticles and claimed that the generation of nanoparticles in
the FEAG process, was not influenced by the evaporation rate of the solvent.
As shown in Table 1, there are no great differences on the density and viscosity of the solution
precursors, however the solubility of nickel nitrate in water was the highest among the precursors used.
One can suggest that the solubility plays an important role in the low-pressure spray pyrolysis and
greatly influences the final product particles.
The particle formation is regarded to be affected not only by the solubility of starting precursor, but
also by the solvent evaporation rate, pyrolysis rate of droplet/precipitate, diffusion rate of precipitate, as
well as the phase transition. Until now, however, it is clear that the formation of particles by spray
pyrolysis is a complex process and is still difficult to accurately model [2,3]. The mechanism of
agglomerated particle formation in a low-pressure spray pyrolysis will be described in the following.
One can assume that in a conventional (atmospheric pressure) spray pyrolysis, homogeneous nucleation
would occur when the solute concentration at the surface of the droplet reached the critical
supersaturation. After nucleation of the solid, precipitation occurs only in the part of the droplet where
the solute concentration is higher than the equilibrium saturation. From micron droplets, hollow
(submicron) particles result if the solute concentration at the center of the droplet is less than the
equilibrium saturation of the solute. Our numerical simulation model of conventional spray pyrolysis
considered the effect of parameters such as process temperature and the initial solute concentration on
the morphology of particles [2]. Lower process temperatures and higher initial solute concentrations
favored the formation of dense (i.e. aggregate of nanocrystallites) particles.
When the solvent evaporation rate is too high relative to the diffusion rate of the precipitation, hollow
particles were obtained as in the case of conventional spray pyrolysis. In low-pressure spray pyrolysis
as well as in its condition of predetermined high-temperature, it is predicted that the solvent
evaporation rate is extremely higher than the precipitation diffusion rate. In this case, then, the
nanoparticles or weak agglomerated particles are formed prior to the solid-state reaction without the
formation of hollow particles. Therefore, in this study, it is also predicted that the operating pressure
(i.e. low pressure) highly influences the solvent evaporation rate of the atomized droplet.
The mechanisms of nanoparticle formation is showed schematically in Fig. 6. In case of a solute with
a low water solubility (e.g. formate precursor), precipitates are abundantly generated that promote the
agglomeration by solvent evaporation and thermal decomposition. It is because the supersaturation
state is easily formed in the droplet by solvent evaporation, even if the solvent sufficiently exist in the
droplet. Then, hollow or spherical particles were obtained. In case of a solution with a high solubility
(e.g. nitrate precursor), the agglomeration is suppressed and the crystallite grow at a low number
concentration. When the solvent evaporation rate is higher (i.e. short residence time) than precipitate
diffusion rate, nanoparticles are formed. On the other hand, aggregated particles (in submicron) are
obtained, when solvent evaporation rate is low, i.e. long residence time. Accordingly, the described
particle formation mechanism in low-pressure environment that we suggested can demonstrate well our
experimental result.