Microhardness of thin solid films

Article abstract of DOI:10.1002/pssa.2211570216

The microhardness of various thin solid films was measured by using a method based on the calculation of the relative contribution of substrate and coating to the `composite' microhardness value measured for hard coatings on softer substrate. The results obtained confirm the application of the method used and allow to give some conclusions concerning the influence of the technological process on the mechanical properties of thin films.