Kinetics of the reaction of gallium arsenide with molecular chlorine

Article abstract of DOI:10.1063/1.454988

The reaction of Cl2 with the (100) face of a GaAs single crystal was studied in the temperature range from 25 to 150 deg C.The reaction was found to be first order in Cl2 at low pressures with an activation energy of 23.6 kcal.At pressures above 10 Torr it was found to reach a limiting rate with an activation energy of 14.2 kcal, attributable to the enthalpy of desorption of the GaCl3 product from this surface.

Full text of DOI:10.1063/1.454988

Kinetics of the reaction of gallium arsenide with molecular chlorine
J. H. Ha, E. A. Ogryzlo, and S. Polyhronopoulos
Citation: The Journal of Chemical Physics 89, 2844 (1988); doi: 10.1063/1.454988
View online: http://dx.doi.org/10.1063/1.454988
View Table of Contents: http://scitation.aip.org/content/aip/journal/jcp/89/5?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
93.180.53.211 On: Sat, 08 Feb 2014 19:44:01

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
93.180.53.211 On: Sat, 08 Feb 2014 19:44:01

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
93.180.53.211 On: Sat, 08 Feb 2014 19:44:01

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
93.180.53.211 On: Sat, 08 Feb 2014 19:44:01