Full text of DOI:10.1063/1.105930

Removing native oxide from Si(001) surfaces using photoexcited fluorine gas
Takayuki Aoyama, Tatsuya Yamazaki, and Takashi Ito
Citation: Applied Physics Letters 59, 2576 (1991); doi: 10.1063/1.105930
View online: http://dx.doi.org/10.1063/1.105930
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/59/20?ver=pdfcov
Published by the AIP Publishing
Articles you may be interested in
Native oxides and carbon contamination removal from InAs(100) surface by molecular hydrogen flow at
moderate substrate temperatures: Stoichiometric and morphological studies
J. Appl. Phys. 107, 053518 (2010); 10.1063/1.3311549
Effects of native oxide removal from silicon substrate and annealing on SiO2 films deposited at 120°C by
plasma enhanced chemical vapor deposition using disilane and nitrous oxide
J. Vac. Sci. Technol. B 14, 727 (1996); 10.1116/1.588705
Nonuniformities of native oxides on Si(001) surfaces formed during wet chemical cleaning
Appl. Phys. Lett. 61, 102 (1992); 10.1063/1.107653
Native oxidation of the Si(001) surface: Evidence for an interfacial phase
Appl. Phys. Lett. 58, 1044 (1991); 10.1063/1.104418
Lowtemperature native oxide removal from silicon using nitrogen trifluoride prior to lowtemperature silicon
epitaxy
Appl. Phys. Lett. 53, 1423 (1988); 10.1063/1.99961
This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
133.1.198.126 On: Tue, 09 Dec 2014 03:57:55

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
133.1.198.126 On: Tue, 09 Dec 2014 03:57:55

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
133.1.198.126 On: Tue, 09 Dec 2014 03:57:55

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
133.1.198.126 On: Tue, 09 Dec 2014 03:57:55