Model for the formation of silicon carbide from the pyrolysis of dichlorodimethylsilane in hydrogen: II, silicon carbide formation from silicon and methane

Article abstract of DOI:10.1111/j.1151-2916.1993.tb03688.x

A model has been developed for the deposition of silicon carbide from the pyrolysis of dichlorodimethylsilane in hydrogen. Gas chromatography was used to determine the volatile products of reaction. The model developed is based on the experimental data.