J. Phys. Chem. A 1997, 101, 9341-9343
Shock Tube Study of the Reaction of H Atoms with TiCl4
J. Herzler and P. Roth*
9341
Institut f u¨ r Verbrennung und Gasdynamik, Gerhard-Mercator-UniVersit a¨ t Duisburg, 47048 Duisburg, Germany
X
ReceiVed: June 5, 1997; In Final Form: September 17, 1997
The reaction of H atoms with TiCl
and 1500 K and pressures around 1.5 bar by applying atomic resonance absorption spectrometry for time-
resolved measurements of H atoms at the L line. The thermal decomposition of ethyl iodide (C I) served
as the H atom source. By using a high excess of TiCl , the consumption of H could be modeled by pseudo
first-order kinetics. For the reaction TiCl + H f TiCl
4
was studied behind reflected shock waves at temperatures between 1190
R
2 5
H
4
4
3
+ HCl a temperature-independent rate coefficient
13
3
-1 -1
of k
1
) 3.5 ( 0.9 × 10 cm mol
s
was found for the temperature range of the present experiments.
1. Introduction
TiCl4 is the most commonly used precursor for the production
1,2
of industrially very important products such as titania and TiN.
High-temperature gas-phase processes, like chemical vapor
deposition (CVD), high-temperature reactors, and flames are
often used for the production of these substances. Titania is
synthesized on a large scale in flame reactors by the “chloride”
3
process using TiCl4, oxygen, and hydrocarbons along with
various additives as educts. The reaction of TiCl4 + H is one
of the important starting reactions during the oxidation of TiCl4
in the flame. It is also part of the chain reactions by which
TiCl4 decomposes (TiCl4 + H f TiCl3 + HCl, TiCl3 + H2 f
TiCl3H + H) under lower temperatures CVD conditions.
For the further development of these high-temperature gas-
phase production processes, the knowledge of the elementary
kinetic steps is necessary. Despite the industrial relevance of
the titanium compounds, there are no kinetic high-temperature
data on reactions of TiCl4.
Figure 1. H atom calibration curve. Solid line: fit, A ) 1 -
H
-8
0.65
0.55
exp(-7.9 cm × 1.17 × 10 cm × [H] ).
-
8
down to pressures below 1 × 10 mbar by a turbo molecular
pump. Gas mixtures were prepared manometrically in a
stainless steel UHV storage cylinder, which also could be baked
out and evacuated using a separate turbo molecular pumping
unit. The residual gases in all UHV devices were analyzed by
quadrupole mass-spectrometers, and were found to be practically
free of hydrocarbons. More details of the setup are given
In the present study the rate coefficient of the reaction
TiCl + H f TiCl + HCl
(R1)
4
3
6,7
was directly measured by using the shock tube as a high-
temperature wave reactor, detecting H by atomic resonance
absorption spectrometry (ARAS). The well-known two-step
thermal decomposition of ethyl iodide (C2H5I)
elsewhere. Argon used in the present study was of the highest
commercially available purity (g99.9999%). Ethyl iodide
(g99%) and titanium tetrachloride (g99.9%), which are liquid
at normal conditions, were injected and evaporated in separated
stainless steel vessels.
C H I f C H + I
2
5
2
5
The shock tube is equipped with diagnostics for ARAS
consisting of a microwave excited discharge lamp, the optical
absorption path in the shock tube, a 1 m vuv monochromator,
and a solar blind photomultiplier. The lamp was operated with
a flowing gas mixture of 1% H2 in He maintained at a pressure
of about 5 mbar and a microwave power of about 50 W. The
spectral shape of the LR line (λ ) 121.6 nm) emitted by the
resonance lamp is not precisely known due to the influence of
self-absorption and self-reversal in the lamp gas. Hence precise
calibration measurements were made to relate measured absorp-
tion to the corresponding H atom concentration by using the
reaction of O atoms with H2 to produce H atoms.8 This
procedure is suitable because the thermal decomposition of H2
is very slow at temperatures below 2100 K. The source of O
atoms was the dissociation of N2O, which is relatively fast.
Therefore, a mixture of 1 ppm N2O and 200 ppm H2 is suitable
to cover the temperature range from 1500 to 2100 K.10
The results of the calibration procedure shown in Figure 1
can be expressed by a modified Lambert-Beer law:
C H f C H + H
2
5
2
4
was used to produce H atoms.4 At temperatures T g 1190 K
and low initial concentrations, the H formation is very fast
(
>97% within 30 µs) and no subsequent reactions of H, I, and
C2H4 were observed so that ethyl iodide is a well-defined H
atom source at these conditions.5
2
. Experimental Section
,9
The experiments were carried out in a stainless steel pressure
driven shock tube with an internal diameter of 79 mm. It is
divided by a thin aluminum diaphragm into a driver section of
.5 m and a driven section of 5.7 m in length. The internal
surface has been specially prepared for ultrahigh-vacuum (UHV)
purposes. The driven section can be baked out and pumped
3
X
Abstract published in AdVance ACS Abstracts, November 15, 1997.
S1089-5639(97)01841-0 CCC: $14.00 © 1997 American Chemical Society