Polymeric cyanoborane, (CNBH2)n: single source for chemical vapor deposition of boron nitride films

Article abstract of DOI:10.1111/j.1151-2916.1991.tb06895.x

Polymeric cyanoborane, (CNBH₂)_n, is a material readily prepared by passing hydrogen chloride through an ether suspension of sodium cyanotrihydroborate. This polymeric material was volatilized in a CVD reactor to produce, at 600°C, amorphous films containing boron, nitrogen, and carbon. Residual carbon present in the films was removed by ammonia treatment at 800°C, producing nearly stoichiometric boron nitride films that were adherent to a variety of substrates including silicon.